-
1
المؤلفون: Qais Saadeh, Vicky Philipsen, Devesh Thakare, Philipp Naujok, Meiyi Wu, Frank Scholze, Christian Buchholz, Claudia Tagbo-Fotso, Ayhan Babalik, Bettina Kupper, Victor Soltwisch
المصدر: Optical Materials Express. 13:78
مصطلحات موضوعية: Technology, 10 NM, Science & Technology, SOFT-X-RAY, Materials Science, NICKEL, K ABSORPTION EDGES, COPPER, Materials Science, Multidisciplinary, Optics, WAVELENGTH, Electronic, Optical and Magnetic Materials, REFLECTANCE MEASUREMENTS, Physical Sciences, REFLECTIVITY, PHOTOABSORPTION, MULTILAYER MIRRORS
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4ff8fe1aa8c51a923d5ca3fa58c352ff
https://doi.org/10.1364/ome.474887 -
2
المؤلفون: Annett Barboutis, Ayhan Babalik, Jana Puls, Christian Stadelhoff, Anja Schönstedt, Jana Lehnert, Claudia Tagbo, Christian Laubis, Michael Sintschuk, Anja Babuschkin, Heiko Mentzel, Andreas Fischer, Frank Scholze, Christian Buchholz, Sina Jaroslawzew
المصدر: Extreme Ultraviolet (EUV) Lithography X.
مصطلحات موضوعية: Optics, Materials science, Beamline, business.industry, Extreme ultraviolet lithography, Detector, Radiant energy, Radiometry, business, Fluence, Metrology, Diode
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::37df636c64aaf4f39073c293cb67a02f
https://doi.org/10.1117/12.2514933 -
3
المؤلفون: Claudia Tagbo, Victor Soltwisch, Christian Laubis, Frank Scholze, Christian Buchholz, Andreas Fischer
المصدر: International Conference on Extreme Ultraviolet Lithography 2018.
مصطلحات موضوعية: Wavelength, Optics, Optical coating, Materials science, business.industry, Extreme ultraviolet lithography, Transmittance, Synchrotron radiation, Magnification, Reflectometry, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5a7adc4a4ac5a55fb1c6ed7075425101
https://doi.org/10.1117/12.2501774