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المؤلفون: Justin Clements, Vandana Venkatasubramanian, Christa Montgomery, Eswar Ramanathan, Jeffrey Riendeau, Veenadhar Katragadda, Alan Cusick, Edwin Soler, Qiushi Wang, Jay Mody, Lloyd Smith, Arthur Gasasira, Shafaat Ahmed, Colin Bombardier, Petrov Nicolai, Bill Evans, Raymond Krom, Martin Muthee, Michael Hatzistergos, Owen Brown, Jung Tae Hwang, Jian Qiu, Vincent Liao, Kok Hin Teo
المصدر: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Computer science, Semiconductor device fabrication, Data integrity, Contact resistance, Process (computing), Wafer, Upstream (networking), Root cause, Automotive engineering, Line (electrical engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ff7464b8c4d2cfd95d8c83042d070e96
https://doi.org/10.1109/asmc.2019.8791826 -
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المؤلفون: Joseph F. Shepard, Henrik Johanson, Vandana Venkatasubramanian, Jay Mody, Takmeel Qanit, Ashwini Chandrasekar, Eswar Ramanathan, Craig Child, AnbuSelvam Km Mahalingam, Lei Jiang, Brett T. Cucci, Alycia Roux, O'brien Brendan, Christa Montgomery, Bradley Morganfeld, Keith Donegan, Colin Bombardier, Sang-Kee Eah, Vijaya Rana, Ghosh Somnath, Daniel Damjanovic, Anirvan Sircar, Zhiguo Sun, Singh Sunil K, Rebekah Sheraw, Ordonio Christopher, Silvestre MaryClaire, Adam DaSilva
المصدر: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Materials science, Etching (microfabrication), Chemical-mechanical planarization, Technology scaling, Nanotechnology, Thin film, Hard mask
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3b80f0efb35ac3f6be7ae230059a989a
https://doi.org/10.1109/asmc.2019.8791788