المؤلفون: Colm Flannery, Tony Flaherty, O. Lefeuvre, Tony Randles, L. Robert, Ellen Matthaei-Schulz, Pavel V. Zinin

المصدر: Microchimica Acta. 133:11-15

مصطلحات موضوعية: Materials processing, Materials science, Test procedures, Acoustic microscopy, Mechanical engineering, engineering.material, Titanium nitride, Analytical Chemistry, chemistry.chemical_compound, Coating, chemistry, Tool steel, engineering, Quantitative assessment, Reliability (statistics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::957930fec3e169dde553f4cd6fef5d80
https://doi.org/10.1007/s006040070065

المؤلفون: Frank Palmieri, Michael D. Stewart, Jeff Wetzel, Jianjun Hao, Yukio Nishimura, Kane Jen, Colm Flannery, Bin Li, Huang-Lin Chao, Soo Young, Woon C. Kim, Paul S. Ho, C. G. Willson

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Back end of line, Resist, Semiconductor device fabrication, law, Copper interconnect, Nanotechnology, Dielectric, Photolithography, Lithography, law.invention, Nanoimprint lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b6850d60ca79435632f2fe3813f1d710
https://doi.org/10.1117/12.655604

المؤلفون: Donna C. Hurley, Colm Flannery

المصدر: AIP Conference Proceedings.

مصطلحات موضوعية: Interconnection, Materials science, business.industry, Miniaturization, Electronic engineering, Optoelectronics, Microelectronics, Dielectric, Nanoindentation, business, Porous medium, Porosity, Light scattering

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a7b721c295f9758413e631aedadae58d
https://doi.org/10.1063/1.1570303