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1
المؤلفون: Naoki Tanaka, Takahiro Kozawa, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana
المصدر: Japanese Journal of Applied Physics. 61:086509
مصطلحات موضوعية: Physics and Astronomy (miscellaneous), General Engineering, General Physics and Astronomy
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2
المؤلفون: Tomoe Otsuka, Yusa Muroya, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana, Takahiro Kozawa
المصدر: Japanese Journal of Applied Physics. 61:086508
مصطلحات موضوعية: Physics and Astronomy (miscellaneous), General Engineering, General Physics and Astronomy
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3
المؤلفون: Naoki Tanaka, Kyoko Matsuoka, Takahiro Kozawa, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana
المصدر: Japanese Journal of Applied Physics. 61:SD1016
مصطلحات موضوعية: Physics and Astronomy (miscellaneous), General Engineering, General Physics and Astronomy
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4
المؤلفون: Tomoe Otsuka, Yusa Muroya, Takuya Ikeda, Yoshitaka Komuro, Daisuke Kawana, Takahiro Kozawa
المصدر: Japanese Journal of Applied Physics. 61:036503
مصطلحات موضوعية: Physics and Astronomy (miscellaneous), General Engineering, General Physics and Astronomy
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5
المؤلفون: Naoki Tanaka, Yoshitaka Komuro, Kyoko Matsuoka, Takahiro Kozawa, Ikeda Takuya, Kyoko Watanabe, Daisuke Kawana, Kazuki Azumagawa
المصدر: Advances in Patterning Materials and Processes XXXVIII.
مصطلحات موضوعية: Tetramethylammonium hydroxide, Aqueous solution, Materials science, Kinetics, Quartz crystal microbalance, chemistry.chemical_compound, chemistry, Resist, Chemical engineering, medicine, Molar mass distribution, Swelling, medicine.symptom, Dissolution
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::73a1997bcca80ca58188f8c93e669f17
https://doi.org/10.1117/12.2584067 -
6
المؤلفون: Kyoko Watanabe, Kazuki Azumagawa, Yoshitaka Komuro, Naoki Tanaka, Takahiro Kozawa, Ikeda Takuya, Kyoko Matsuoka, Daisuke Kawana
المصدر: Extreme Ultraviolet Lithography 2020.
مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Kinetics, Polymer, Quartz crystal microbalance, chemistry, Chemical engineering, Resist, medicine, Swelling, medicine.symptom, Dispersion (chemistry), Dissolution, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ad0046cf35db29ad82d6678f98f55a32
https://doi.org/10.1117/12.2574877 -
7
المؤلفون: Daisuke Kawana, Yusa Muroya, Takahiro Kozawa, Yoshitaka Komuro, Ikeda Takuya, Kengo Ikeuchi
المصدر: Japanese Journal of Applied Physics. 60:076503
مصطلحات موضوعية: Metal, chemistry.chemical_compound, Materials science, Physics and Astronomy (miscellaneous), chemistry, Resist, visual_art, Polymer chemistry, General Engineering, visual_art.visual_art_medium, Oxide, General Physics and Astronomy
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8
المؤلفون: Takahiro Kozawa, Kyoko Matsuoka, Ayako Nakajima, Kyoko Watanabe, Akiyoshi Yamazaki, Daisuke Kawana, Yoshitaka Komuro
المصدر: Extreme Ultraviolet (EUV) Lithography X.
مصطلحات موضوعية: chemistry.chemical_classification, Aqueous solution, Materials science, Diffusion, Kinetics, Quartz crystal microbalance, Polymer, Alkali metal, Chemical engineering, chemistry, medicine, Swelling, medicine.symptom, Dissolution
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9f8d3d0bfe5d9a1201d64302f8869d98
https://doi.org/10.1117/12.2514938 -
9
المؤلفون: Odashima Rin, Katsumi Ohmori, Daisuke Kawana, Takehiro Seshimo, Rina Maeda, Teruaki Hayakawa, Yutaka Takenaka
المصدر: Journal of Photopolymer Science and Technology. 29:689-693
مصطلحات موضوعية: 010309 optics, Materials science, Polymers and Plastics, 0103 physical sciences, Organic Chemistry, Materials Chemistry, Copolymer, Perpendicular, 02 engineering and technology, Composite material, 021001 nanoscience & nanotechnology, 0210 nano-technology, 01 natural sciences
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d25e9e70725904d0c59196505d71bd90
https://doi.org/10.2494/photopolymer.29.689 -
10
المؤلفون: Tomotaka Yamada, Katsumi Ohmori, Kensuke Matsuzawa, Daisuke Kawana, Shogo Matsumaru, Fujii Tatsuya, Yoshitaka Komuro
المصدر: Journal of Photopolymer Science and Technology. 29:489-493
مصطلحات موضوعية: 010302 applied physics, Materials science, Polymers and Plastics, business.industry, Extreme ultraviolet lithography, Organic Chemistry, High resolution, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Optics, 0103 physical sciences, Materials Chemistry, Optoelectronics, Sensitivity (control systems), 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::693b42f3bc529f24982caa40df2627b6
https://doi.org/10.2494/photopolymer.29.489