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المؤلفون: Mustafa Akbulut, Vasanth Allampalli, Joseph Ervin, Jiangjiang Gu, Andras Pap, Daniel Faken, David M. Fried, Ken Greiner
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Nanotechnology, 02 engineering and technology, Surface finish, Photoresist, 021001 nanoscience & nanotechnology, 01 natural sciences, Capacitance, 010309 optics, Back end of line, Resist, Parasitic capacitance, 0103 physical sciences, Multiple patterning, Optoelectronics, 0210 nano-technology, business, Front end of line
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::27d03ace546db9aa6885426ebaaebca0
https://doi.org/10.1117/12.2258157 -
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المؤلفون: Mattan Kamon, Mustafa Akbulut, Daniel Faken, Vasanth Allampalli, Ken Greiner, David M. Fried, Yiguang Yan, Andras Pap
المصدر: SPIE Proceedings.
مصطلحات موضوعية: 010302 applied physics, Fabrication, business.industry, Computer science, Transistor, Process (computing), 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, Capacitor, Semiconductor, law, Embedded system, 0103 physical sciences, Process optimization, 0210 nano-technology, business, Dram, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4ada2a2790f4f0c86aebfdaa3cf27b7d
https://doi.org/10.1117/12.2218935 -
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المؤلفون: Vasanth Allampalli, Jiangjiang Gu, Dalong Zhao, David M. Fried, Daniel Faken, Ken Greiner
المصدر: Advanced Etch Technology for Nanopatterning V
مصطلحات موضوعية: 010302 applied physics, 0209 industrial biotechnology, Fabrication, Materials science, business.industry, Nanotechnology, 02 engineering and technology, Surface finish, Line edge roughness, 01 natural sciences, Back end of line, 020901 industrial engineering & automation, Etching (microfabrication), 0103 physical sciences, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::465123116e48e4f2d428c2a28c2d6e71
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المؤلفون: Andras Pap, Vasanth Allampalli, Mattan Kamon, Daniel Faken, David M. Fried, Ken Greiner, Yiguang Yan, Mustafa Akbulut
المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 15:1
مصطلحات موضوعية: Computer science, Nanotechnology, 02 engineering and technology, 01 natural sciences, law.invention, law, 0103 physical sciences, Process integration, Hardware_INTEGRATEDCIRCUITS, Process optimization, Electrical and Electronic Engineering, 010302 applied physics, Dynamic random-access memory, business.industry, Mechanical Engineering, Transistor, Process (computing), 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Capacitor, Computer data storage, 0210 nano-technology, business, Computer hardware, Dram
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8c584c12369b66e4d13435e26acf2c0e
https://doi.org/10.1117/1.jmm.15.3.031605