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المؤلفون: Keren J. Kanarik, Wojciech T. Osowiecki, Yu Lu, Dipongkar Talukder, Niklas Roschewsky, Sae Na Park, Mattan Kamon, David M. Fried, Richard A. Gottscho
المصدر: Nature. 616:707-711
مصطلحات موضوعية: Multidisciplinary
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المؤلفون: Campbell Millar, Salvatore Maria Amoroso, Michael Hargrove, Binjie Cheng, Ken Greiner, Asen Asenov, Louis Gerrer, Razaidi Hussin, David M. Fried, Craig Alexander, Dave Reid, Andrew R. Brown
المصدر: IEEE Transactions on Electron Devices. 62:1739-1745
مصطلحات موضوعية: Model extraction, Engineering, business.industry, Transistor, Process (computing), Semiconductor device modeling, Process design, Semiconductor process simulation, Electronic, Optical and Magnetic Materials, law.invention, law, Logic gate, Electronic engineering, Electrical and Electronic Engineering, business, Technology CAD, Simulation
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المؤلفون: Mustafa Akbulut, Vasanth Allampalli, Joseph Ervin, Jiangjiang Gu, Andras Pap, Daniel Faken, David M. Fried, Ken Greiner
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Nanotechnology, 02 engineering and technology, Surface finish, Photoresist, 021001 nanoscience & nanotechnology, 01 natural sciences, Capacitance, 010309 optics, Back end of line, Resist, Parasitic capacitance, 0103 physical sciences, Multiple patterning, Optoelectronics, 0210 nano-technology, business, Front end of line
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::27d03ace546db9aa6885426ebaaebca0
https://doi.org/10.1117/12.2258157 -
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المؤلفون: Mattan Kamon, Mustafa Akbulut, Daniel Faken, Vasanth Allampalli, Ken Greiner, David M. Fried, Yiguang Yan, Andras Pap
المصدر: SPIE Proceedings.
مصطلحات موضوعية: 010302 applied physics, Fabrication, business.industry, Computer science, Transistor, Process (computing), 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, Capacitor, Semiconductor, law, Embedded system, 0103 physical sciences, Process optimization, 0210 nano-technology, business, Dram, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4ada2a2790f4f0c86aebfdaa3cf27b7d
https://doi.org/10.1117/12.2218935 -
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المؤلفون: Vasanth Allampalli, Jiangjiang Gu, Dalong Zhao, David M. Fried, Daniel Faken, Ken Greiner
المصدر: Advanced Etch Technology for Nanopatterning V
مصطلحات موضوعية: 010302 applied physics, 0209 industrial biotechnology, Fabrication, Materials science, business.industry, Nanotechnology, 02 engineering and technology, Surface finish, Line edge roughness, 01 natural sciences, Back end of line, 020901 industrial engineering & automation, Etching (microfabrication), 0103 physical sciences, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::465123116e48e4f2d428c2a28c2d6e71
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المؤلفون: Meikei Ieong, Min Yang, Massimo V. Fischetti, Evgeni Gusev, Victor Chan, L.E. Burns, A.I. Chou, John A. Ott, K.K. Chan, David M. Fried, Leathen Shi, James H. Stathis
المصدر: IEEE Transactions on Electron Devices. 53:965-978
مصطلحات موضوعية: Electron mobility, Fabrication, Materials science, Silicon, Wafer bonding, chemistry.chemical_element, Hardware_PERFORMANCEANDRELIABILITY, Epitaxy, Engineering physics, Electronic, Optical and Magnetic Materials, Planar, CMOS, chemistry, Hardware_GENERAL, MOSFET, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Electrical and Electronic Engineering
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المؤلفون: Sampath Purushothaman, Steven E. Steen, Lidija Sekaric, John M. Hergenrother, J. Patel, Inna V. Babich, James P. Doyle, Mary Beth Rothwell, Michael J. Rooks, Jim R. Brancaccio, Roy Yu, Ron Nunes, J.J. Bucchignano, Anna W. Topol, R. Viswanathan, David M. Fried, Sharee J. McNab
المصدر: Microelectronic Engineering. 83:754-761
مصطلحات موضوعية: business.industry, Computer science, Electrical engineering, Device file, Integrated circuit, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Optics, Resist, law, Node (circuits), Electrical and Electronic Engineering, Photolithography, business, Lithography, Throughput (business), Electron-beam lithography
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المؤلفون: Ronnen Andrew Roy, Meikei Ieong, J. Kedzierski, Diane C. Boyd, David M. Fried, E.J. Nowak, Thomas S. Kanarsky, Ying Zhang, Hon-Sum Philip Wong
المصدر: IEEE Transactions on Electron Devices. 50:952-958
مصطلحات موضوعية: Fin, Materials science, Silicon, Equivalent series resistance, business.industry, chemistry.chemical_element, Hardware_PERFORMANCEANDRELIABILITY, Epitaxy, Electronic, Optical and Magnetic Materials, Ion implantation, chemistry, Gate oxide, Parasitic element, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Optoelectronics, Field-effect transistor, Electrical and Electronic Engineering, business
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المؤلفون: Andras Pap, Vasanth Allampalli, Mattan Kamon, Daniel Faken, David M. Fried, Ken Greiner, Yiguang Yan, Mustafa Akbulut
المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 15:1
مصطلحات موضوعية: Computer science, Nanotechnology, 02 engineering and technology, 01 natural sciences, law.invention, law, 0103 physical sciences, Process integration, Hardware_INTEGRATEDCIRCUITS, Process optimization, Electrical and Electronic Engineering, 010302 applied physics, Dynamic random-access memory, business.industry, Mechanical Engineering, Transistor, Process (computing), 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Capacitor, Computer data storage, 0210 nano-technology, business, Computer hardware, Dram
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8c584c12369b66e4d13435e26acf2c0e
https://doi.org/10.1117/1.jmm.15.3.031605 -
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المؤلفون: Michael V. Aquilino, Jaeger Daniel, J. Koshy, E. Engbrecht, Edward P. Maciejewski, L. Zhuang, Mahender Kumar, G. Costrini, J. Gill, Paul D. Agnello, Rajeev Malik, Jin Cai, Gregory G. Freeman, S. Lucarini, N. Arnold, Geng Wang, David M. Fried, Matthew W. Stoker, R. Bolam, Dimitris P. Ioannou, Katsunori Onishi, Paul C. Parries, Richard Wise, Alvin G. Thomas, Min Dai, Viorel Ontalus, Jessica Dechene, Shreesh Narasimha, Robert R. Robison, Judson R. Holt, Dechao Guo, Paul Chang, Naftali E. Lustig, Michael P. Chudzik, Basanth Jagannathan, Paul S. McLaughlin, Bernard A. Engel, Xiaolin Li, Amit Kumar, W. Kong, Rishikesh Krishnan, Barry P. Linder, J. Norum, C. DeWan, Claude Ortolland, Karen A. Nummy, Michael A. Gribelyuk, Jae Gon Lee, Christopher D. Sheraw, G. Han, C-H. Lin, Benjamin Cipriany, Takashi Ando, N. Habib, J. Johnson
المصدر: 2012 International Electron Devices Meeting.
مصطلحات موضوعية: Hardware_MEMORYSTRUCTURES, Materials science, Memory hierarchy, business.industry, Copper interconnect, Electrical engineering, Silicon on insulator, Hardware_PERFORMANCEANDRELIABILITY, PMOS logic, CMOS, MOSFET, Hardware_INTEGRATEDCIRCUITS, business, Dram, NMOS logic, Hardware_LOGICDESIGN
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8c61f3f0814bd02ce1388effadad931e
https://doi.org/10.1109/iedm.2012.6478971