المؤلفون: Hui-Hong Deng, Ke-Qiang Deng, Lun Zeng, Qi-Cai Peng, Bin-Guang Zhao, Pu Chen, De-Wu Yao

المصدر: Piezoelectricity, Acoustic Waves and Device Applications.

مصطلحات موضوعية: Materials science, business.industry, Optoelectronics, High-power impulse magnetron sputtering, Sputter deposition, Thin film, business, Piezoelectricity

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::38fd402147c9be79226d52ac2158189f
https://doi.org/10.1142/9789812770165_0022

المؤلفون: Pu CHEN, Qi-Cai PENG, Bin-Guang ZHAO, Lun ZENG, Ke-Qiang DENG, Hui-Hong DENG, De-Wu YAO

المصدر: Piezoelectricity, Acoustic Waves & Device Applications - Proceedings of the 2006 Symposium; 2007, p119-122, 4p

مصطلحات موضوعية: PIEZOELECTRIC thin films, ALUMINUM nitride films, MAGNETRON sputtering, X-ray diffraction, MICROSTRUCTURE