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المؤلفون: William J. Durand, Stephen M. Sirard, Christopher M. Bates, Gregory Blachut, Yusuke Asano, Michael J. Maher, Roel Gronheid, Yasunobu Someya, Andrew M. Dinhobl, Christopher J. Ellison, Lane Austin, C. Grant Willson, Diane J. Hymes
المصدر: Chemistry of Materials. 28:8951-8961
مصطلحات موضوعية: Materials science, Silicon, General Chemical Engineering, Electron energy loss spectroscopy, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, General Chemistry, 010402 general chemistry, 021001 nanoscience & nanotechnology, Epitaxy, 01 natural sciences, Dot pitch, 0104 chemical sciences, chemistry, Scanning transmission electron microscopy, Materials Chemistry, Copolymer, Wafer, 0210 nano-technology, Immersion lithography
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المؤلفون: Andrew Liang, Gregory Blachut, Geert Mannaert, Boon Teik Chan, Christopher J. Ellison, Geert Vandenberghe, Chris A. Mack, C. Grant Willson, Stephen M. Sirard, Paulina Rincon-Delgadillo, Diane J. Hymes, Michael J. Maher
المصدر: Advanced Etch Technology for Nanopatterning VII.
مصطلحات موضوعية: Directed self assembly, Materials science, Silicon, chemistry.chemical_element, 02 engineering and technology, Surface finish, 010402 general chemistry, 021001 nanoscience & nanotechnology, Line edge roughness, 01 natural sciences, 0104 chemical sciences, chemistry.chemical_compound, chemistry, Silicon nitride, Transfer (computing), Copolymer, Composite material, Reactive-ion etching, 0210 nano-technology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::541b8712c77425233e4057615b03f772
https://doi.org/10.1117/12.2297489 -
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المؤلفون: Nader Shamma, Chris Mack, Justin Jiang, Rich Wise, Liu Yang, Andrew Liang, Jengyi Yu, Liang Chen-Wei, Diane J. Hymes, Stephen M. Sirard
المصدر: Metrology, Inspection, and Process Control for Microlithography XXXII.
مصطلحات موضوعية: Scanner, Materials science, business.industry, Extreme ultraviolet lithography, 02 engineering and technology, Surface finish, Edge (geometry), 021001 nanoscience & nanotechnology, 01 natural sciences, Metrology, 010309 optics, Optics, Resist, Stack (abstract data type), 0103 physical sciences, 0210 nano-technology, business, Smoothing
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::65a82f5498be8063d0cd311330a87d67
https://doi.org/10.1117/12.2297328 -
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المؤلفون: Diane J. Hymes, Mehul N. Patel, Steve Sirard, Ratchana Limary
المصدر: Solid State Phenomena. 219:119-122
مصطلحات موضوعية: Yield (engineering), Materials science, Capillary action, Nanotechnology, Semiconductor device, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surface tension, Contact angle, Freeze-drying, Stiction, General Materials Science, Composite material, Scale down
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المؤلفون: Gregory Blachut, Emir Gurer, Grant Willson, Christopher J. Ellison, Diane J. Hymes, Kazunori Mori, David B. Graves, William J. Durand, Michael J. Maher, Yusuke Asano, Stephen M. Sirard, Dustin W. Janes, Yasunobu Someya, L. Azarnouche
المصدر: SPIE Newsroom.
مصطلحات موضوعية: Materials science, Plasma etching, business.industry, Copolymer, Optoelectronics, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e2bae1b1a3a18d6ab659a4791e5a2fcd
https://doi.org/10.1117/2.1201603.006351 -
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المؤلفون: Emir Gurer, Michael J. Maher, Gregory Blachut, C. Grant Willson, David B. Graves, L. Azarnouche, Christopher J. Ellison, Stephen M. Sirard, William J. Durand, Yasunobu Someya, Yusuke Asano, Kazunori Mori, Dustin W. Janes, Diane J. Hymes
المصدر: SPIE Proceedings.
مصطلحات موضوعية: 010302 applied physics, chemistry.chemical_classification, Plasma etching, Materials science, Silicon, Kinetics, technology, industry, and agriculture, chemistry.chemical_element, 02 engineering and technology, Polymer, 021001 nanoscience & nanotechnology, 01 natural sciences, Lamella (surface anatomy), X-ray photoelectron spectroscopy, Chemical engineering, chemistry, Block (telecommunications), 0103 physical sciences, Copolymer, 0210 nano-technology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3cea1c064d5d4bd43d4eff628328dc7b
https://doi.org/10.1117/12.2220305 -
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المؤلفون: William J. Durand, L. Azarnouche, Diane J. Hymes, Stephen M. Sirard, Emir Gurer, Christopher J. Ellison, Carlton G Willson, David B. Graves, Gregory Blachut
المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 34:061602
مصطلحات موضوعية: Materials science, Silicon, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, 01 natural sciences, Barrier layer, chemistry.chemical_compound, 0103 physical sciences, Materials Chemistry, Surface layer, Electrical and Electronic Engineering, Silicon oxide, Instrumentation, Organosilicon, 010302 applied physics, chemistry.chemical_classification, business.industry, Process Chemistry and Technology, fungi, technology, industry, and agriculture, Polymer, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Optoelectronics, Polymer blend, Self-assembly, 0210 nano-technology, business
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9دورية أكاديمية
لا يتم عرض هذه النتيجة على الضيوف.
تسجيل الدخول للوصول الكامل.