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1دورية أكاديميةActivation of nitrogen species mixed with Ar and H2S plasma for directly N-doped TMD films synthesis
المؤلفون: Jinill Cho, Hyunho Seok, Inkoo Lee, Jaewon Lee, Eungchul Kim, Dougyong Sung, In-Keun Baek, Cheol-Hun Lee, Taesung Kim
المصدر: Scientific Reports, Vol 12, Iss 1, Pp 1-8 (2022)
وصف الملف: electronic resource
Relation: https://doaj.org/toc/2045-2322
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2
المؤلفون: Jungmin Ko, Jinkyu Bae, Minho Park, Younghyun Jo, Hyunjae Lee, Kyunghyun Kim, Suyoung Yoo, Sang Ki Nam, Dougyong Sung, Byungjo Kim
المصدر: Journal of Physics D: Applied Physics. 56:344001
مصطلحات موضوعية: Acoustics and Ultrasonics, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials
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3
المؤلفون: Hyunho, Seok, Inkoo, Lee, Jinill, Cho, Dougyong, Sung, In-Keun, Baek, Cheol-Hun, Lee, Eungchul, Kim, Sanghuck, Jeon, Kihong, Park, Taesung, Kim
المصدر: Nanotechnology. 33(2)
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4
المؤلفون: In-Keun Baek, Sanghuck Jeon, Hyunho Seok, Eungchul Kim, Inkoo Lee, Dougyong Sung, Cheol-Hun Lee, Jinill Cho, Taesung Kim, Kihong Park
المصدر: Nanotechnology. 33:025603
مصطلحات موضوعية: Materials science, Nanostructure, Mechanical Engineering, Tantalum, Analytical chemistry, chemistry.chemical_element, Bioengineering, General Chemistry, Plasma, Chemical vapor deposition, chemistry, X-ray photoelectron spectroscopy, Mechanics of Materials, Plasma-enhanced chemical vapor deposition, Transmission electron microscopy, General Materials Science, Wafer, Electrical and Electronic Engineering
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5
المؤلفون: Seungkyu Lim, Dougyong Sung, Hyun-Ju Lee, Woo-Hee Kim, Jehun Woo, Sejin Oh, Stacey F. Bent
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 36:01B104
مصطلحات موضوعية: 010302 applied physics, Chemistry, Analytical chemistry, 02 engineering and technology, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Isotropic etching, Surfaces, Coatings and Films, Volumetric flow rate, Adsorption, Chemical bond, Etching (microfabrication), Chemisorption, 0103 physical sciences, Reactive-ion etching, 0210 nano-technology, Layer (electronics)
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6
المؤلفون: Vladimir Volynets, Youngmin Park, Andrey Ushakov, Sangmin Jeong, Gon-Ho Kim, Dougyong Sung
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 27:13-19
مصطلحات موضوعية: business.industry, Chemistry, Plasma parameters, Analytical chemistry, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, Triode, Physics::Plasma Physics, Etching (microfabrication), law, Physics::Space Physics, Optoelectronics, Wafer, Plasma diagnostics, Capacitively coupled plasma, Electric current, business
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المؤلفون: Vladimir Volynets, Sangmin Jeong, Yongho Ihm, Andrey Ushakov, Han Moon-Hyeong, Jehun Woo, Dougyong Sung
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:1198-1207
مصطلحات موضوعية: Fluoroform, Chemistry, Analytical chemistry, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Mass spectrometry, Surfaces, Coatings and Films, Ion, chemistry.chemical_compound, Electrode, Mass spectrum, Capacitively coupled plasma, Fluorocarbon
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المؤلفون: V. G. Pashkovsky, Vladimir Volynets, K. S. Jeong, T. Y. Kwon, J. B. Lee, Andrey Ushakov, Yu.N. Tolmachev, Dougyong Sung
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:406-415
مصطلحات موضوعية: Argon, chemistry.chemical_element, Atmospheric-pressure plasma, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Surfaces, Coatings and Films, chemistry, Physics::Plasma Physics, Etching (microfabrication), Capacitively coupled plasma, Gas composition, Emission spectrum, Reactive-ion etching, Atomic physics
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9
المؤلفون: Andrew J. Gellman, Jing Gui, Xiaoding Ma, Dougyong Sung
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:316-321
مصطلحات موضوعية: Chemistry, Scattering, Excited state, Electron energy loss spectroscopy, Molecular vibration, High resolution electron energy loss spectroscopy, Surfaces and Interfaces, Electron, Atomic physics, Thin film, Condensed Matter Physics, Surfaces, Coatings and Films, Ion
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المؤلفون: Dougyong Sung, Donggun Kim, Andrew J. Gellman
المصدر: Tribology International. 38:151-157
مصطلحات موضوعية: Mechanical Engineering, chemistry.chemical_element, Mineralogy, Surfaces and Interfaces, Substrate (electronics), Toluene, Decomposition, Surfaces, Coatings and Films, Metal, chemistry.chemical_compound, Adsorption, chemistry, Chemical engineering, Mechanics of Materials, visual_art, visual_art.visual_art_medium, Reactivity (chemistry), Benzene, Carbon