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المؤلفون: Carol Boye, DukKyun Moon, Steven McDermott, Norbert Arnold, Nicole Saulnier, Felix Levitov, Sam Choi, Alex Goldenshtein, Uri Smolyan, Noam Amit, Injo Ok, Iqbal Saraf
المصدر: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::52bc90878a883049cac5651f227b2459
https://doi.org/10.1109/asmc54647.2022.9792525 -
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المؤلفون: Felix Levitov, Paz Yabbo, Brad Austin, Omri Baum, Nathaniel Mowell, Jennifer Church, DukKyun Moon, Uri Smolyan, Alex Joseph Varghese, Teresa A. Esposito, Luciana Meli
المصدر: 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Computer science, Extreme ultraviolet lithography, Process (computing), 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Characterization (materials science), Reliability engineering, 010309 optics, 0103 physical sciences, 0210 nano-technology, Focus (optics), Reduction (mathematics), Throughput (business)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::94cd6620cec7a30ee0b9b7e357112241
https://doi.org/10.1109/asmc51741.2021.9435687