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1دورية أكاديمية
المؤلفون: Q.T. Le, E. Gül Arslan, J. Rip, H. De Coster, P. Verdonck, D. Radisic, F. Schleicher, I. Vaesen, T. Conard, E. Altamirano-Sanchez
المصدر: Micro and Nano Engineering, Vol 19, Iss , Pp 100208- (2023)
مصطلحات موضوعية: Ruthenium wet etching, Ruthenium residue removal, Ruthenium recess, Hydrogen plasma, XPS, Annealed ruthenium, Electronics, TK7800-8360, Technology (General), T1-995
وصف الملف: electronic resource
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المؤلفون: V. Vega-Gonzalez, D. Radisic, S. Choudhury, D. Tierno, A. Thiam, D. Batuk, G.T. Martinez, F. Seidel, S. Decoster, S. Kundu, D. Tsvetanova, A. Peter, H. De Coster, A. Sepulveda-Marquez, E. Altamirano-Sanchez, Bt Chan, Y. Drissi, Y. Sherazi, J. Uk-Lee, I. Ciofi, G. Murdoch, N. Nagesh, G. Hellings, J. Ryckaert, S. Biesemans, E. Dentoni Litta, N. Horiguchi, S. Park, Zs. Tokei
المصدر: 2022 International Electron Devices Meeting (IEDM).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f9b19ff76457aea9272a0db1975d3005
https://doi.org/10.1109/iedm45625.2022.10019483 -
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المؤلفون: Geert Hellings, E. Dupuy, R. Wuytens, Rita Vos, M.M. Heyns, E. Altamirano-Sanchez, Karolien Jans, Koen Martens, W. Van Roy, Tim Stakenborg, Simone Severi, Liesbet Lagae, Sybren Santermans, Mohit Kumar Gupta, B. Du Bois
المصدر: 2019 IEEE International Electron Devices Meeting (IEDM).
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, 010401 analytical chemistry, Gate dielectric, 01 natural sciences, Noise (electronics), 0104 chemical sciences, Threshold voltage, PMOS logic, Transducer, 0103 physical sciences, Optoelectronics, Work function, business, Sensitivity (electronics), Voltage
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::cc22b1e27c8a93eb31a09cca4a6d8689
https://doi.org/10.1109/iedm19573.2019.8993589 -
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المؤلفون: A. De Keersgieter, Dan Mocuta, L.-A. Ragnarsson, Daniil Marinov, Robert Langer, E. Dupuy, Roger Loo, Yong Kong Siew, Andriy Hikavyy, G. Mannaert, Anurag Vohra, Liesbeth Witters, Nadine Collaert, Farid Sebaai, V. De Heyn, Hiroaki Arimura, E. Capogreco, Kathy Barla, Christa Vrancken, A. Opdebeeck, F. Holstetns, Steven Demuynck, Naoto Horiguchi, Jerome Mitard, E. Altamirano Sanchez, Clement Porret
المصدر: 2019 Symposium on VLSI Technology.
مصطلحات موضوعية: 010302 applied physics, Physics, P channel, chemistry, 0103 physical sciences, chemistry.chemical_element, Germanium, 02 engineering and technology, 021001 nanoscience & nanotechnology, 0210 nano-technology, 01 natural sciences, Scaling, Molecular physics
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::bb7eec167a5bc03b727e666ffe52f7e9
https://doi.org/10.23919/vlsit.2019.8776558 -
5دورية أكاديمية
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6Replacement Metal Contact Using Sacrificial ILD0 for Wrap Around Contact in Scaled FinFET Technology
المؤلفون: Katia Devriendt, T. Hopf, Naoto Horiguchi, Antoine Pacco, Lieve Teugels, Dan Mocuta, Steven Demuynck, E. Altamirano Sanchez, Christa Vrancken, A. Dangol, S-A. Chew, Liping Zhang, J. Versluijs
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: Materials science, Flow (psychology), Contact resistance, law.invention, PMOS logic, Metal, law, visual_art, Wrap around, visual_art.visual_art_medium, Composite material, Spark plug, Contact formation, NMOS logic
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3e945735d2e79e50029eb0cf269757b4
https://doi.org/10.1109/iitc.2018.8430457 -
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المؤلفون: Liesbeth Witters, E. Altamirano Sanchez, M. Demand, Steven Demuynck, A. Nackaerts, Tom Vandeweyer, K. Devriendt, K. von Arnim, Rita Rooyackers, Nadine Collaert, Anabela Veloso, Serge Biesemans, Andriy Hikavyy, Malgorzata Jurczak, Florian Bauer, K. De Meyer, Isabelle Ferain, Abdelkarim Mercha, Bertrand Parvais
المساهمون: Laboratorium for Micro- and Photonelectronics, Electronics and Informatics, Faculty of Economic and Social Sciences and Solvay Business School, Faculty of Medicine and Pharmacy, Chemical Engineering and Industrial Chemistry
المصدر: Lecture Notes in Electrical Engineering ISBN: 9789048193783
مصطلحات موضوعية: Materials science, Dopant, business.industry, Transistor, High density, Hardware_PERFORMANCEANDRELIABILITY, Industrial and Manufacturing Engineering, Power (physics), law.invention, Planar, law, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Static random-access memory, business, Low voltage, Communication channel
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cea5430e03ac86b9c01ed2b7de1473e9
https://doi.org/10.1007/978-90-481-9379-0_4 -
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المؤلفون: Steven Demuynck, Serge Biesemans, Rita Rooyackers, Katia Devriendt, K. von Arnim, Liesbeth Witters, T. Vandeweyer, E. Altamirano Sanchez, Abdelkarim Mercha, Andriy Hikavyy, Nadine Collaert, Florian Bauer, K. De Meyer, Anabela Veloso, Marc Demand, Malgorzata Jurczak, A. Nackaerts, Bertrand Parvais, Isabelle Ferain
المصدر: 2008 IEEE International Conference on Integrated Circuit Design and Technology and Tutorial.
مصطلحات موضوعية: Hardware_MEMORYSTRUCTURES, Materials science, business.industry, Sram cell, Transistor, Electrical engineering, Gate stack, chemistry.chemical_element, Hardware_PERFORMANCEANDRELIABILITY, Integrated circuit design, Fin (extended surface), law.invention, chemistry, law, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Static random-access memory, business, Tin, Low voltage
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d72c390d471d54a292ea752e380e4142
https://doi.org/10.1109/icicdt.2008.4567246 -
9كتاب
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10كتاب
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تسجيل الدخول للوصول الكامل.