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المصدر: Design-Process-Technology Co-optimization for Manufacturability XII.
مصطلحات موضوعية: Interconnection, Computer science, Monte Carlo method, Context (language use), 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Capacitance, 010309 optics, Process variation, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Multiple patterning, Electronic engineering, 0210 nano-technology, Scaling, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e5743277345868cd4db6a817ba6f0026
https://doi.org/10.1117/12.2297117 -
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المؤلفون: Jean Jordan-Sweet, Conal E. Murray, E. Todd Ryan, Stephen W. Bedell
المصدر: Powder Diffraction. 30:99-103
مصطلحات موضوعية: Diffraction, Radiation, Materials science, Isotropy, Thermodynamics, Interaction model, Condensed Matter Physics, Weighting, X-ray crystallography, General Materials Science, Crystallite, Elasticity (economics), Linear combination, Instrumentation
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المؤلفون: C. Labelle, Mark Raymond, X. Lin, Griselda Bonilla, Raghuveer R. Patlolla, Xunyuan Zhang, E. Todd Ryan, Theodore E. Standaert, Daniel C. Edelstein, Frank W. Mont, Huai Huang, Terry A. Spooner, Donald F. Canaperi
المصدر: 2017 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, Scattering, Copper interconnect, chemistry.chemical_element, 02 engineering and technology, Adhesion, Conductivity, 021001 nanoscience & nanotechnology, 01 natural sciences, Ruthenium, chemistry, Electrical resistivity and conductivity, 0103 physical sciences, Electronic engineering, Composite material, 0210 nano-technology, Tin, Temperature coefficient
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1d68153620ce14e41e6d7fbb3a81e8a2
https://doi.org/10.1109/iitc-amc.2017.7968941 -
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المؤلفون: Martin O'Toole, James Hsueh-Chung Chen, Shreesh Narasimha, Jason Eugene Stephens, Shao Beng Law, Genevieve Beique, Ben Kim, Craig Child, E. Todd Ryan, Steven Leibiger, Louis J. Lanzerotti, Terry A. Spooner
المصدر: 2017 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Optical engineering, Pillar, Nanotechnology, 01 natural sciences, Aspect ratio (image), Planarity testing, 010309 optics, Chemical-mechanical planarization, 0103 physical sciences, Multiple patterning, Optoelectronics, business, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4672fecbe6df4af021d44ffb253152cc
https://doi.org/10.1109/iitc-amc.2017.7968964 -
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المؤلفون: Xunyuan Zhang, Wei Wang, James J. Kelly, Roger A. Quon, E. Todd Ryan, Theodorus E. Standaert, Frank W. Mont
المصدر: 2017 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Interconnection, Materials science, business.industry, Metallurgy, Copper interconnect, chemistry.chemical_element, 02 engineering and technology, Dielectric, Conductivity, 021001 nanoscience & nanotechnology, 01 natural sciences, Copper, chemistry, Electrical resistivity and conductivity, Transmission electron microscopy, 0103 physical sciences, Optoelectronics, 0210 nano-technology, business, Cobalt
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::29f217ad59c30fb29253d64075130b78
https://doi.org/10.1109/iitc-amc.2017.7968971 -
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المؤلفون: Larry Zhao, Christophe Gillot, E. Todd Ryan, Chen Wu, Xunyuan Zhang
المصدر: ECS Journal of Solid State Science and Technology. 4:N160-N162
مصطلحات موضوعية: Materials science, Dielectric, Engineering physics, Electronic, Optical and Magnetic Materials
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المؤلفون: Donald F. Canaperi, Raghuveer R. Patlolla, Daniel C. Edelstein, Griselda Bonilla, Huai Huang, Wei Wang, E. Todd Ryan, Paul S. McLaughlin, Xunyuan Zhang, Juntao Li, Terry A. Spooner, Eric G. Liniger, Frank W. Mont, Chao-Kun Hu, C. Labelle
المصدر: 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC).
مصطلحات موضوعية: 010302 applied physics, Materials science, Dielectric strength, business.industry, Electrical engineering, Copper interconnect, chemistry.chemical_element, Time-dependent gate oxide breakdown, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Electromigration, Ruthenium, Laser linewidth, chemistry, Electrical resistivity and conductivity, 0103 physical sciences, Optoelectronics, 0210 nano-technology, business, Temperature coefficient
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::38407d3e5ed6268183f862873faae6ac
https://doi.org/10.1109/iitc-amc.2016.7507650 -
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المؤلفون: James Hsueh-Chung Chen, Nicholas LiCausi, E. Todd Ryan, Theodorus E Standaert, Griselda Bonilla
المصدر: 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d7d2baebb8ad5f81fae186045057a9f2
https://doi.org/10.1109/iitc-amc.2016.7507641 -
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المؤلفون: Paul R. Besser, Christian Witt, Conal E. Murray, E. Todd Ryan, Michael F. Toney, Jean Jordan-Sweet
المصدر: Powder Diffraction. 27:92-98
مصطلحات موضوعية: Void (astronomy), Radiation, Materials science, business.industry, Annealing (metallurgy), chemistry.chemical_element, Plasticity, Condensed Matter Physics, Copper, Thermal expansion, Stress (mechanics), chemistry, Thermal, Microelectronics, General Materials Science, Composite material, business, Instrumentation
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المؤلفون: E. Todd Ryan, Steven E. Molis
المصدر: Journal of Applied Physics. 122:244104
مصطلحات موضوعية: 010302 applied physics, Surface diffusion, Aqueous solution, Materials science, Silicon, Kinetics, General Physics and Astronomy, chemistry.chemical_element, 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, Photochemistry, medicine.disease_cause, 01 natural sciences, Nanolithography, chemistry, 0103 physical sciences, medicine, 0210 nano-technology, Inert gas, Ultraviolet