المؤلفون: Qu, Z., Wang, W., Li, X., Li, Q., Zheng, Y.

المصدر: IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 70:1-10 2021

المؤلفون: Zilian Qu, Yuanjin Zheng, Qi Li, Wensong Wang, Xueli Li

المساهمون: School of Electrical and Electronic Engineering

مصطلحات موضوعية: Materials science, Eddy-current sensor, Silicon, 020208 electrical & electronic engineering, Tantalum, chemistry.chemical_element, 02 engineering and technology, Chemical Mechanical Polishing, Copper, Barrier layer, chemistry, Chemical-mechanical planarization, 0202 electrical engineering, electronic engineering, information engineering, Electrical and electronic engineering [Engineering], Wafer, Electrical and Electronic Engineering, Composite material, Eddy Current Based Measurement System, Instrumentation, Nanoscopic scale

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7ec527d362b8e14083acd090049a703a
https://hdl.handle.net/10356/159502