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1دورية أكاديمية
المؤلفون: PETKOVIĆ, B., RESIC, S., PETKOVIĆ, D.
المصدر: International Journal of Laser Science: Fundamental Theory & Analytical Methods; 2021, Vol. 2 Issue 3/4, p181-193, 13p
مصطلحات موضوعية: PHOTORESISTS, MICROELECTRONICS, ELECTRON resists, FUZZY systems, EXCIMER lasers
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2دورية أكاديمية
المؤلفون: Zhou, Xiaoyan, Gedalin, Michael, Russell, Christopher T., Angelopoulos, Vassilis, Drozdov, Alexander Y.
المصدر: Journal of Geophysical Research. Space Physics; Nov2020, Vol. 125 Issue 11, p1-17, 17p
مصطلحات موضوعية: ELECTRON resists, MAGNETIC reconnection, ELECTRODYNAMICS, HYPOTHESIS, QUANTITATIVE research
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3دورية أكاديمية
المؤلفون: Pandya, Ankur, Jha, Prafulla K.
المصدر: International Journal of Nanoscience; Dec2018, Vol. 17 Issue 6, pN.PAG-N.PAG, 7p
مصطلحات موضوعية: ELECTRON transport, PHONONS, ELECTRON resists, TRANSITION metals, NANORIBBONS
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4دورية أكاديمية
المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-10, 10p
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5دورية أكاديمية
المؤلفون: Carey IV, Patrick H., Jiancheng Yang, Fan Ren, Hays, David C., Pearton, Stephen J., Akito Kuramata, Kravchenko, Ivan I.
المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-5, 5p
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6دورية أكاديمية
المؤلفون: Caillau, Mathieu, Crémillieu, Pierre, Laurenceau, Emmanuelle, Chevolot, Yann, Leclercq, Jean-Louis, Alekseev, Sergeï, Chevalier, Céline, Delair, Thierry
المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-6, 6p
مصطلحات موضوعية: ELECTRON beam lithography, CHITOSAN, NANOLITHOGRAPHY, SILICA, PLASMA etching, ELECTRON resists
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7دورية أكاديمية
المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-7, 7p
مصطلحات موضوعية: DEPOLYMERIZATION, CROSSLINKING (Polymerization), ACID catalysts, ELECTRON beam lithography, ELECTRON resists
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8دورية أكاديمية
المؤلفون: Kaspar, Corinna, Butschke, Jörg, Irmscher, Mathias, Martens, Stephan, Sailer, Holger, Kirchner, Robert, Guzenko, Vitaliy A., Schift, Helmut, Burghartz, Joachim N.
المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-6, 6p
مصطلحات موضوعية: ELECTRON beam lithography, NANOFABRICATION, MICROFABRICATION, ELECTRON resists, THIN films, POLYMETHYLMETHACRYLATE
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9دورية أكاديمية
المصدر: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-8, 8p
مصطلحات موضوعية: ELECTRON beam lithography, ELECTRON resists, ELECTRON beam focusing, ELECTRON beams, PARTICLE beam focusing
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10دورية أكاديمية
المؤلفون: Tsutsumi, Naoto, Fukuda, Asato, Nakamura, Ryotaro, Kinashi, Kenji, Sakai, Wataru
المصدر: Applied Physics A: Materials Science & Processing; Aug2017, Vol. 123 Issue 8, p1-7, 7p
مصطلحات موضوعية: PHOTORESISTS, MICROELECTRONICS, ELECTRON resists, FEMTOSECOND lasers, LASERS