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المؤلفون: Scott Warrick, Will Conley, Mazen Saied, Yves Rody, Christian Gardin, Jonathan Planchot, Christophe Couderc, Patrick Montgomery, Pierre-Jerome Goirand, Catherine Martinelli, Amandine Borjon, Frank Sundermann, Bill Wilkinson, Yorick Trouiller, Jean-Christophe Urbani, Frederic Robert, Laurent Le Cam, Florent Vautrin, G. Kerrien, Jerome Belledent, Emic Yesilada, Vincent Farys
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Resolution enhancement technologies, Computer science, Transistor, Integrated circuit, Design for manufacturability, law.invention, law, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Multiple patterning, Process window, System on a chip, Photolithography, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c32fba57c3e8540d10beaa1e15e963b6
https://doi.org/10.1117/12.714116