المؤلفون: E. Brezza, F. Deprat, C. de Buttet, A. Gauthier, M. Gregoire, D. Guiheux, V. Guyader, M. Juhel, I. Berbezier, E. Assaf, L. Favre, P. Chevalier, C. Gaquière, N. Defrance

المساهمون: STMicroelectronics [Crolles] (ST-CROLLES), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Puissance - IEMN (PUISSANCE - IEMN), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire Cycles Géochimiques et ressources (LCG), Géosciences Marines (GM), Institut Français de Recherche pour l'Exploitation de la Mer (IFREMER)-Institut Français de Recherche pour l'Exploitation de la Mer (IFREMER), Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Hôpital Louis Pradel [CHU - HCL], Hospices Civils de Lyon (HCL), Declaration of competing interestThe authors declare that they have no known competing financial interests or personal relationships that could have appeared toinfluence the work reported in this paper., NO FUNDING FOUND, Laboratoire commun STMicroelectronics-IEMN T1

المصدر: Solid-State Electronics
Solid-State Electronics, 2023, 204, pp.108654. ⟨10.1016/j.sse.2023.108654⟩

مصطلحات موضوعية: [PHYS]Physics [physics], [SPI]Engineering Sciences [physics], Materials Chemistry, Heterojunction Bipolar Transistor, Thermal treatment, Electrical and Electronic Engineering, Interface, SiconiTM etching, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Hydrofluoric acid etching

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0cfe18456e4b23e3772456d19857235a
https://hal.science/hal-04084450

المؤلفون: J. F Deprat

المساهمون: Société de géographie

المصدر: Annales de Géographie 14(74):126-143

URL الوصول: https://www.persee.fr/doc/geo_0003-4010_1905_num_14_74_6467

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المؤلفون: J. Lespiaux, F. Deprat, B. Rodrigues Goncalves, J. Souc, F. Leverd, M. Juhel, J.-G. Mattei, C. Giroud-Garampon, A. Roman, T. Magis, J.M. Hartmann

المصدر: Materials Science in Semiconductor Processing. 144:106549

مصطلحات موضوعية: Mechanics of Materials, Mechanical Engineering, General Materials Science, Condensed Matter Physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0ca59bdc707c13cb5b442f3978c07956
https://doi.org/10.1016/j.mssp.2022.106549

المؤلفون: Claire Fenouillet-Beranger, Maud Vinet, Virginie Beugin, Névine Rochat, Vincent Jousseaume, Perrine Batude, Daniel Benoit, Christophe Licitra, F. Deprat, N. Rambal, G. Imbert, Véronique Caubet-Hilloutou, Chloé Guerin

المصدر: Microelectronic Engineering. 167:90-94

مصطلحات موضوعية: Materials science, Nanotechnology, 02 engineering and technology, Dielectric, 01 natural sciences, law.invention, Barrier layer, Stack (abstract data type), law, Ellipsometry, 0103 physical sciences, Thermal stability, Electrical and Electronic Engineering, Fourier transform infrared spectroscopy, 010302 applied physics, Interconnection, business.industry, Transistor, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Optoelectronics, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b8f5a05ab37aeed59e87447a24701c7a
https://doi.org/10.1016/j.mee.2016.11.006

المؤلفون: Patrice Gergaud, F. Deprat, Claire Fenouillet-Beranger, S. Favier, Fabrice Nemouchi, Ph. Rodriguez, Dominique Mangelinck, S. Zhiou, Ting Luo, C. Sese

المساهمون: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), STMicroelectronics [Crolles] (ST-CROLLES), Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP), Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS), Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)

المصدر: Microelectronic Engineering
Microelectronic Engineering, 2018, 200, pp.19-25. ⟨10.1016/j.mee.2018.08.006⟩
Microelectronic Engineering, Elsevier, 2018, 200, pp.19-25. ⟨10.1016/j.mee.2018.08.006⟩

مصطلحات موضوعية: Materials science, Silicon, chemistry.chemical_element, 02 engineering and technology, Substrate (electronics), 01 natural sciences, chemistry.chemical_compound, Phase (matter), 0103 physical sciences, Silicide, Thermal stability, Electrical and Electronic Engineering, Thin film, Sheet resistance, ComputingMilieux_MISCELLANEOUS, 010302 applied physics, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Chemical engineering, 0210 nano-technology, Cobalt

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6b7d2e666efd754794564754f9d67497
https://hal.science/hal-02403223

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المؤلفون: Magali Gregoire, Fabrice Nemouchi, Patrice Gergaud, F. Deprat, Claire Fenouillet-Beranger, Perrine Batude, D. Barge, Maud Vinet, Philippe Rodriguez, N. Rambal, Sylvain Joblot

المصدر: physica status solidi c. 13:760-765

مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Transistor, Stacking, Nanotechnology, Context (language use), 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Salicide, 01 natural sciences, PMOS logic, law.invention, chemistry.chemical_compound, CMOS, chemistry, law, 0103 physical sciences, Silicide, Optoelectronics, Wafer, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7786cdc7c505b11c57ed84bdc0b6ea35
https://doi.org/10.1002/pssc.201600043

المؤلفون: Perrine Batude, N. Rambal, Magali Gregoire, Maud Vinet, H. Dansas, Claire Fenouillet-Beranger, Fabrice Nemouchi, L. Pasini, D. Lafond, Laurent Brunet, Xavier Garros, Mikael Casse, M. Mellier, L. Tosti, F. Deprat, Bernard Previtali

المصدر: Solid-State Electronics. 113:2-8

مصطلحات موضوعية: Materials science, Fabrication, business.industry, Transistor, Electrical engineering, Silicon on insulator, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, law.invention, PMOS logic, chemistry.chemical_compound, chemistry, law, Thermal, Silicide, Materials Chemistry, Optoelectronics, Thermal stability, Electrical and Electronic Engineering, business, NMOS logic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::624836d4fbf40170712d2f7c471a4a45
https://doi.org/10.1016/j.sse.2015.05.005

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