المؤلفون: M.-L. Pourteau, A. Gharbi, P. Brianceau, J.-A. Dallery, F. Laulagnet, G. Rademaker, R. Tiron, H.-J. Engelmann, J. von Borany, K.-H. Heinig, M. Rommel, L. Baier

المصدر: Micro and Nano Engineering, Vol 9, Iss , Pp 100074- (2020)

مصطلحات موضوعية: Single-electron-transistor, Multilayer nanopillars, Si nanodots, E-beam lithography, ICP-RIE, EFTEM, Electronics, TK7800-8360, Technology (General), T1-995

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2590007220300290; https://doaj.org/toc/2590-0072

URL الوصول: https://doaj.org/article/293532bf485e4b0bb8f502c2bf8aa57a

المؤلفون: A. Jannaud, Marianne Coig, J. Garrione, Mathieu Bernard, Marie-Claire Cyrille, F. Al Mamun, F. Mazen, B. Hemard, T. Magis, C. Socquet-Clerc, Gabriele Navarro, V. Meli, Guillaume Bourgeois, Emmanuel Nolot, Francois Andrieu, N. Bernier, J. P. Barnes, Eugénie Martinez, N. Castellani, C. Charpin, F. Milesi, C. Sabbione, F. Laulagnet

المساهمون: Département d'Architectures, Conception et Logiciels Embarqués-LETI (DACLE-LETI), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA), European Project: 783176,WAKeMeUp

المصدر: Microelectronics Reliability
Microelectronics Reliability, In press, ⟨10.1016/j.microrel.2021.114221⟩
Microelectronics Reliability, Elsevier, In press, ⟨10.1016/j.microrel.2021.114221⟩

مصطلحات موضوعية: Materials science, 4kb arrays, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, [SPI]Engineering Sciences [physics], Reliability (semiconductor), 0103 physical sciences, Phase-Change Memory (PCM), Electrical and Electronic Engineering, Safety, Risk, Reliability and Quality, 010302 applied physics, Carbon ion, business.industry, Ion Implantation, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Reliability, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Active layer, Phase-change memory, Ion implantation, chemistry, Beamline, Optoelectronics, 0210 nano-technology, business, Layer (electronics), Carbon

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::70e57736ecd498b80119d3cb144b5aed
https://hal-cea.archives-ouvertes.fr/cea-03373794

المؤلفون: P. Brianceau, M. Rommel, Hans-Jürgen Engelmann, M.-L. Pourteau, J. von Borany, F. Laulagnet, Guido Rademaker, J.-A. Dallery, Ahmed Gharbi, L. Baier, Karl-Heinz Heinig, Raluca Tiron

المساهمون: Département Plate-Forme Technologique (DPFT), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Vistec Electron Beam GmbH, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Fraunhofer Institute for Integrated Systems and Device Technology (Fraunhofer IISB), Fraunhofer (Fraunhofer-Gesellschaft), European Project: 688072,H2020,H2020-ICT-2015,IONS4SET(2016), Publica

المصدر: Micro and Nano Engineering
Micro and Nano Engineering, Elsevier, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩
Micro and Nano Engineering, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩
Micro and Nano Engineering 9(2020), 100074
Micro and Nano Engineering, Vol 9, Iss, Pp 100074-(2020)

مصطلحات موضوعية: Reactive ion etching, Materials science, Fabrication, lcsh:TK7800-8360, EFTEM, 02 engineering and technology, 01 natural sciences, 010309 optics, Single-electron transistor, Characterization methods, E-beam lithography, Robustness (computer science), lcsh:Technology (General), Energy-filtered transmission electron microscopy, 0103 physical sciences, Electrical and Electronic Engineering, Reactive-ion etching, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Lithography, Nanopillar, business.industry, ICP-RIE, lcsh:Electronics, Single-electron-transistor, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Multilayer nanopillars, CMOS, lcsh:T1-995, Optoelectronics, Si nanodots, 0210 nano-technology, business, Silicon nanodots, Critical dimension

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1ffaa0176ed92185b48dbaa77d24531d
https://hal-cea.archives-ouvertes.fr/cea-03409432

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المؤلفون: C. Socquet-Clerc, J. Sandrini, Michel Frei, Gabriele Navarro, Nicolas Bernier, Emmanuel Nolot, Lavinia Nistor, T. Magis, J. Garrione, Marie-Claire Cyrille, O. Cueto, Mathieu Bernard, Etienne Nowak, F. Fillot, F. Laulagnet, Guillaume Bourgeois, Mahendra Pakala, N. Castellani, C. Sabbione

المصدر: 2019 IEEE 11th International Memory Workshop (IMW).

مصطلحات موضوعية: 010302 applied physics, Materials science, Annealing (metallurgy), business.industry, chemistry.chemical_element, Germanium, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Phase-change memory, chemistry, 0103 physical sciences, Optoelectronics, 0210 nano-technology, Cycling, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::04fdf9f36c649c39e93bddc789e127cd
https://doi.org/10.1109/imw.2019.8739656

المؤلفون: Raluca Tiron, Hans-Jürgen Engelmann, L. Baier, Ahmed Gharbi, Guido Rademaker, Karl-Heinz Heinig, J.-A. Dallery, P. Brianceau, J. von Borany, M.-L. Pourteau, F. Laulagnet, M. Rommel

المصدر: Microelectronic Engineering. :111336

مصطلحات موضوعية: Set (abstract data type), CMOS, business.industry, Computer science, Optoelectronics, Electrical and Electronic Engineering, Condensed Matter Physics, business, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanopillar

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3b43b81cdf3e25cdf2c0c3b10d835a3f
https://doi.org/10.1016/j.mee.2020.111336

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