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المؤلفون: Peter Awakowicz, Guido Grundmeier, Bert Mallick, Anjana Devi, Nils Boysen, Felix Mitschker, Lukas Mai, Teresa de los Arcos, David Zanders
المصدر: Chemistry – A European Journal. 25:7489-7500
مصطلحات موضوعية: chemistry.chemical_classification, 010405 organic chemistry, Organic Chemistry, Inorganic chemistry, chemistry.chemical_element, General Chemistry, 010402 general chemistry, 01 natural sciences, Evaporation (deposition), Catalysis, 0104 chemical sciences, Atomic layer deposition, chemistry.chemical_compound, chemistry, Aluminium, Aluminium oxide, Thermal stability, Reactivity (chemistry), Trimethylaluminium, Alkyl
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المؤلفون: Peter Awakowicz, Dennis Kirchheim, Moritz Oberberg, Lars Banko, Dario Grochla, Alfred Ludwig, Jan Trieschmann, Thomas Mussenbrock, Stefan Wilski, Christian Hopmann, Guido Grundmeier, Jan Benedikt, Rainer Dahlmann, Rabea Schreckenberg, Ralf Peter Brinkmann, Felix Mitschker, Markus Brochhagen, Teresa de los Arcos, Montgomery Jaritz, Marc Böke
المصدر: Journal of Coatings Technology and Research. 16:573-583
مصطلحات موضوعية: geography, geography.geographical_feature_category, Materials science, Nuclear engineering, Process design, Surfaces and Interfaces, General Chemistry, Plasma, engineering.material, computer.software_genre, Inlet, Surfaces, Coatings and Films, Simulation software, Colloid and Surface Chemistry, Coating, Plasma-enhanced chemical vapor deposition, Homogeneity (physics), engineering, computer, Microwave
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المؤلفون: Marcel Rudolph, Peter Awakowicz, Ilona Rolfes, Dennis Pohle, Jonathan Jenderny, Felix Mitschker, Christian Schulz
المصدر: 2020 50th European Microwave Conference (EuMC).
مصطلحات موضوعية: Materials science, business.product_category, Argon, business.industry, 020208 electrical & electronic engineering, Resonance, chemistry.chemical_element, 020206 networking & telecommunications, Context (language use), 02 engineering and technology, Plasma, Dielectric, engineering.material, Coating, chemistry, Physics::Plasma Physics, Physics::Space Physics, 0202 electrical engineering, electronic engineering, information engineering, Bottle, engineering, Optoelectronics, business, Microwave
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b9bdf6489721f05c5702bbd5c475ba54
https://doi.org/10.23919/eumc48046.2021.9338200 -
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المؤلفون: Christian Hoppe, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa Arcos, Peter Awakowicz, Anjana Devi, Ahmed Gamal Attallah, Maik Butterling, Andreas Wagner, Guido Grundmeier
المصدر: Plasma Processes and Polymers. 19:2100174
مصطلحات موضوعية: Polymers and Plastics, Condensed Matter Physics
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المؤلفون: Felix Mitschker, Anjana Devi, Peter Awakowicz, Zhongshan Li, Claudia Bock, Engin Ciftyurek, Lukas Mai, Alessia Niesen, Klaus Schierbaum, Detlef Rogalla, Matthias Erig, Johannes Mickler
المصدر: Mai, L, Mitschker, F, Bock, C, Niesen, A, Ciftyurek, E, Rogalla, D, Mickler, J, Erig, M, Li, Z, Awakowicz, P, Schierbaum, K & Devi, A 2020, ' From Precursor Chemistry to Gas Sensors : Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications ', Small, vol. 16, no. 22, 1907506 . https://doi.org/10.1002/smll.201907506
مصطلحات موضوعية: zinc precursors, chemistry.chemical_element, 02 engineering and technology, Zinc, 010402 general chemistry, 01 natural sciences, Oxygen, Biomaterials, Atomic layer deposition, chemistry.chemical_compound, Polyethylene terephthalate, Deposition (phase transition), General Materials Science, Reactivity (chemistry), Thin film, zinc oxide, General Chemistry, 021001 nanoscience & nanotechnology, 0104 chemical sciences, gas sensors, chemistry, Chemical engineering, atomic layer deposition, 0210 nano-technology, Stoichiometry, gas barrier layers, Biotechnology
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cc55a0c1359449dbb60ac65016d2a63b
https://pure.au.dk/ws/files/224577471/smll.201907506.pdf -
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المؤلفون: Ante Hecimovic, Marcel Fiebrandt, Peter Awakowicz, Nikita Bibinov, Felix Mitschker, Enrique Iglesias
المصدر: Journal of Physics D: Applied Physics
مصطلحات موضوعية: Materials science, Acoustics and Ultrasonics, chemistry.chemical_element, medicine.disease_cause, 01 natural sciences, 010305 fluids & plasmas, law.invention, Optics, law, Ionization, 0103 physical sciences, medicine, 010302 applied physics, Argon, business.industry, Plasma, Sputter deposition, Condensed Matter Physics, Cathode, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Vacuum chamber, High-power impulse magnetron sputtering, business, Ultraviolet
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::321a280d756e0d160714d462e993d347
https://hdl.handle.net/21.11116/0000-0005-5A70-821.11116/0000-0005-5A72-621.11116/0000-0005-8CA0-8 -
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المؤلفون: Anjana Devi, Dario Grochla, Montgomery Jaritz, Maximilian Gebhard, Peter Awakowicz, Guido Grundmeier, Christian Hoppe, Rainer Dahlmann, Teresa de los Arcos, Lukas Mai, Alfred Ludwig, Dennis Kirchheim, Felix Mitschker, Christoph Zekorn, Lars Banko
المصدر: ACS Applied Materials & Interfaces. 10:7422-7434
مصطلحات موضوعية: 010302 applied physics, Polypropylene, Materials science, 02 engineering and technology, Quartz crystal microbalance, 021001 nanoscience & nanotechnology, 01 natural sciences, Amorphous solid, chemistry.chemical_compound, Atomic layer deposition, chemistry, Chemical engineering, 0103 physical sciences, Polymer substrate, General Materials Science, Thin film, 0210 nano-technology, Layer (electronics), FOIL method
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المؤلفون: Guido Grundmeier, Dennis Kirchheim, Felix Mitschker, Rainer Dahlmann, Peter Awakowicz, T. de los Arcos, Christian Hoppe
المصدر: Surface and Coatings Technology. 335:25-31
مصطلحات موضوعية: 010302 applied physics, Polypropylene, chemistry.chemical_classification, Materials science, Polydimethylsiloxane, technology, industry, and agriculture, 02 engineering and technology, Surfaces and Interfaces, General Chemistry, Polymer, Chemical vapor deposition, Adhesion, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Surfaces, Coatings and Films, chemistry.chemical_compound, chemistry, Chemical engineering, X-ray photoelectron spectroscopy, 0103 physical sciences, Materials Chemistry, 0210 nano-technology, Silicon oxide, Layer (electronics)
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المؤلفون: Manuela Winter, Harish Parala, Ignacio Giner, Guido Grundmeier, Maximilian Gebhard, Lukas Mai, Teresa de los Arcos, Anjana Devi, Felix Mitschker, Peter Awakowicz
المصدر: Chemistry - A European Journal. 23:10768-10772
مصطلحات موضوعية: 010302 applied physics, Process development, Organic Chemistry, Inorganic chemistry, chemistry.chemical_element, 02 engineering and technology, General Chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, Catalysis, Pyrophoricity, chemistry.chemical_compound, Atomic layer deposition, Chemical engineering, chemistry, Aluminium, Homogeneous, 0103 physical sciences, Thermal stability, Thin film, 0210 nano-technology, Trimethylaluminium
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المؤلفون: Jens Wipperfuerth, Rainer Dahlmann, Christian Hopmann, Peter Awakowicz, Felix Mitschker, Stefan Wilski
المصدر: PROCEEDINGS OF PPS-33 : The 33rd International Conference of the Polymer Processing Society – Conference Papers.
مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Polymer, Permeation, medicine.disease, Amorphous solid, Barrier layer, chemistry, Plasma-enhanced chemical vapor deposition, Etching, medicine, Composite material, Thin film, Vapours