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1تقرير
المؤلفون: I Adamovich, S Agarwal, E Ahedo, L L Alves, S Baalrud, N Babaeva, A Bogaerts, A Bourdon, P J Bruggeman, C Canal, E H Choi, S Coulombe, Z Donkó, D B Graves, S Hamaguchi, D Hegemann, M Hori, H-H Kim, G M W Kroesen, M J Kushner, A Laricchiuta, X Li, T E Magin, S Mededovic Thagard, V Miller, A B Murphy, G S Oehrlein, N Puac, R M Sankaran, S Samukawa, M Shiratani, M Šimek, N Tarasenko, K Terashima, E Thomas Jr, J Trieschmann, S Tsikata, M M Turner, I J van der Walt, M C M van de Sanden, T von Woedtke
المصدر: Journal of Physics D: Applied Physics. 55(37):373001
URL الوصول: https://ntrs.nasa.gov/citations/39862894500651
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2
المؤلفون: Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Hubertus Marbach, Klaus Edinger, G. S. Oehrlein
المصدر: Journal of Vacuum Science & Technology A. 41:013004
مصطلحات موضوعية: Surfaces and Interfaces, Condensed Matter Physics, Surfaces, Coatings and Films
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3SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam
المؤلفون: Kang-Yi Lin, Christian Preischl, Christian Felix Hermanns, Daniel Rhinow, Hans-Michael Solowan, Michael Budach, Klaus Edinger, G. S. Oehrlein
المصدر: Journal of Vacuum Science & Technology A. 40:063004
مصطلحات موضوعية: Surfaces and Interfaces, Condensed Matter Physics, Surfaces, Coatings and Films
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4
المؤلفون: J. L. Lindström, G. S. Oehrlein, W. A. Lanford
المصدر: Journal of The Electrochemical Society. 139:317-320
مصطلحات موضوعية: Renewable Energy, Sustainability and the Environment, technology, industry, and agriculture, Analytical chemistry, Chemical vapor deposition, Nitride, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Silicon nitride, chemistry, Etching (microfabrication), Plasma-enhanced chemical vapor deposition, Materials Chemistry, Electrochemistry, Reactive-ion etching, Thin film, Buffered oxide etch
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5
المؤلفون: J. P. Simko, G. S. Oehrlein
المصدر: Journal of The Electrochemical Society. 138:2748-2752
مصطلحات موضوعية: Silicon, Renewable Energy, Sustainability and the Environment, Silicon dioxide, Analytical chemistry, chemistry.chemical_element, Plasma, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, chemistry, Chemical engineering, Etching (microfabrication), Materials Chemistry, Electrochemistry, Reactive-ion etching
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6
المؤلفون: J. P. Simko, G. S. Oehrlein, T. M. Mayer
المصدر: Journal of The Electrochemical Society. 138:277-284
مصطلحات موضوعية: Passivation, Silicon, Plasma cleaning, Hydrogen, Renewable Energy, Sustainability and the Environment, Inorganic chemistry, technology, industry, and agriculture, chemistry.chemical_element, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Secondary ion mass spectrometry, Carbon film, X-ray photoelectron spectroscopy, chemistry, Materials Chemistry, Electrochemistry, Reactive-ion etching
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7
المؤلفون: W. M. Chen, O. O. Awadelkarim, B. Monemar, J. L. Lindström, G. S. Oehrlein
المصدر: Physical Review Letters. 80:423-423
مصطلحات موضوعية: General Physics and Astronomy
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8
المؤلفون: G. S. Oehrlein, M. Haverlag
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 10:2412
مصطلحات موضوعية: Surface coating, Materials science, Optics, Ellipsometry, business.industry, Etching (microfabrication), General Engineering, Wafer, Substrate (electronics), Photoresist, Reflectometry, business, Isotropic etching
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9a2041045c3e047742b1192d8bb01da6
https://doi.org/10.1116/1.586076 -
9
المؤلفون: G. S. Oehrlein, C. Parks, S. N. Chakravarti, J. Keller, S. J. Fonash, X. C. Mu
المصدر: Journal of Applied Physics. 59:2958-2967
مصطلحات موضوعية: Reflection high-energy electron diffraction, Silicon, Chemistry, fungi, technology, industry, and agriculture, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, Isotropic etching, chemistry.chemical_compound, Chemical engineering, X-ray photoelectron spectroscopy, Impurity, Silicide, Dry etching, Reactive-ion etching
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10
المؤلفون: G. S. Oehrlein
المصدر: Journal of Applied Physics. 54:5453-5455
مصطلحات موضوعية: Materials science, Oxygen atom, Silicon, chemistry, Annealing (metallurgy), Kinetics, Inorganic chemistry, Thermal, General Physics and Astronomy, chemistry.chemical_element, Kinetic energy, Chemical composition, Oxygen