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المؤلفون: G. Kerrien, Emek Yesilada, Sebastien Cremer, Vincent Farys, B. Orlando, N. Zeggaoui, Vlad Liubich, Alexander Tritchkov
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Photon, Silicon, Computer science, chemistry.chemical_element, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, 01 natural sciences, Waveguide (optics), law.invention, 010309 optics, Optics, Optical proximity correction, law, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Wafer, Process window, Lithography, business.industry, Photonic integrated circuit, Skew, 021001 nanoscience & nanotechnology, Design for manufacturability, chemistry, Photonics, Photolithography, 0210 nano-technology, business, Waveguide
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::09bebc3f6444aaf6a8777a6f6d7d4d34
https://doi.org/10.1117/12.2257906 -
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المؤلفون: Emek Yesilada, G. Kerrien, Catherine Martinelli, Florent Vautrin, Laurent Le Cam, Christophe Couderc, Jerome Belledent, Frank Sundermann, Patrick Schiavone, Franck Foussadier, Yorick Trouiller, Jonathan Planchot, Jean-Christophe Urbani, Patrick Montgomery, Mazen Saied, Frederic Robert, Amandine Borjon, Bill Willkinson, Yves Rody, Christian Gardin
المساهمون: Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Philips France Semiconducteurs, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Freescale Semiconductor (FREESCALE SEMICONDUCTOR), Freescale semiconductor, STMicroelectronics [Crolles] (ST-CROLLES), Freescale Semiconductor Inc., NXP Semiconductors, Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Microelectronic Engineering
Microelectronic Engineering, Elsevier, 2007, 84 (5-8), pp.741-745. ⟨10.1016/j.mee.2007.01.016⟩
Microelectronic Engineering, 2007, 84 (5-8), pp.741-745. ⟨10.1016/j.mee.2007.01.016⟩مصطلحات موضوعية: Diffraction, Depth of focus, Computer science, SVM, Process window, 02 engineering and technology, 01 natural sciences, 010309 optics, Optics, Optical proximity correction, Position (vector), 0103 physical sciences, Reticle, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Electrical and Electronic Engineering, business.industry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, ORC, Failure prediction, Feature (computer vision), 0210 nano-technology, business, OPC, Exposure latitude, Algorithm
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المؤلفون: Dominique Débarre, G. Kerrien, Jacques Boulmer, Kuniyuki Kakushima, C. Laviron, M. Hernandez, Thierry Sarnet, Alain Bosseboeuf, Nourdin Yaakoubi, Elisabeth Dufour-Gergam, Tarik Bourouina, J. Venturini
المصدر: Applied Surface Science. 247:537-544
مصطلحات موضوعية: Materials science, Silicon, Dopant, business.industry, Doping, General Physics and Astronomy, chemistry.chemical_element, Silicon on insulator, Nanotechnology, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Laser, Surfaces, Coatings and Films, law.invention, Gas immersion laser doping, Semiconductor, chemistry, law, Optoelectronics, Microelectronics, Crystalline silicon, business
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المؤلفون: Dominique Débarre, J.-L. Santailler, H. Akhouayri, D. Camel, C. Laviron, J. Boulmer, G. Kerrien, J. Venturini, D. Berard, M. Hernandez, T. Sarnet
المصدر: Materials Science and Engineering: B. :105-108
مصطلحات موضوعية: Materials science, Dopant, Excimer laser, business.industry, Mechanical Engineering, medicine.medical_treatment, Far-infrared laser, Condensed Matter Physics, Laser, Vertical-cavity surface-emitting laser, law.invention, Thermal laser stimulation, Optical coating, Optics, Mechanics of Materials, law, medicine, Optoelectronics, General Materials Science, Semiconductor optical gain, business
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المؤلفون: C. Laviron, J.-L. Santailler, J. Venturini, T. Sarnet, G. Kerrien, M. Hernandez, D. Camel, J. Boulmer
المصدر: Thin Solid Films. :145-149
مصطلحات موضوعية: Materials science, Excimer laser, Dopant, business.industry, medicine.medical_treatment, Metals and Alloys, Pulse duration, Surfaces and Interfaces, Laser, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Optics, Rapid thermal processing, law, MOSFET, Materials Chemistry, medicine, Field-effect transistor, business, Sheet resistance
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المؤلفون: Dominique Débarre, C. Laviron, M. Hernandez, M.N. Semeria, T. Sarnet, J. Boulmer, G. Kerrien
المصدر: Thin Solid Films. :106-109
مصطلحات موضوعية: Recrystallization (geology), Silicon, Dopant, Chemistry, Annealing (metallurgy), Doping, Metals and Alloys, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Laser, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Gas immersion laser doping, law.invention, law, Materials Chemistry, Sheet resistance
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المؤلفون: D. Zahorski, Dominique Débarre, T. Sarnet, J. Venturini, J. Boulmer, C. Laviron, M.N. Semeria, M. Hernandez, G. Kerrien
المصدر: Journal de Physique IV (Proceedings). 108:71-74
مصطلحات موضوعية: General Physics and Astronomy
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8be892e322a710dbea78d977b9a03893
https://doi.org/10.1051/jp4:20030599 -
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المؤلفون: Dominique Débarre, D. Zahorski, G. Kerrien, J.-L. Santailler, C. Laviron, D. Camel, J. Boulmer, M.N. Semeria, J. Venturini, M. Hernandez, T. Sarnet
المصدر: Applied Surface Science. :345-351
مصطلحات موضوعية: Materials science, Spreading resistance profiling, Computer simulation, business.industry, General Physics and Astronomy, Pulse duration, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Laser, Surfaces, Coatings and Films, law.invention, International Technology Roadmap for Semiconductors, Optics, law, Wafer, Irradiation, business, Spectroscopy
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المؤلفون: Damien Lenoble, A. Grouillet, J. Boulmer, Daniel Bouchier, G. Kerrien, Dominique Débarre
المصدر: Applied Surface Science. 186:45-51
مصطلحات موضوعية: Materials science, Silicon, Dopant, Doping, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Laser, Surfaces, Coatings and Films, Gas immersion laser doping, law.invention, Secondary ion mass spectrometry, International Technology Roadmap for Semiconductors, chemistry, law, Boron
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المؤلفون: G. Kerrien, L. Couturier, L. Karsenti, V. Charbois, M. C. Luche, J. C. Le Denmat, M. Geshel
المصدر: 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
مصطلحات موضوعية: Engineering, business.industry, Process (computing), Process design, Hardware_PERFORMANCEANDRELIABILITY, String searching algorithm, Residual, Reliability engineering, Data set, Node (circuits), Pattern matching, Layer (object-oriented design), business, Algorithm
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3c17bf0bde602b0e445c9c4c83f97ec0
https://doi.org/10.1109/asmc.2009.5155943