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المؤلفون: Manfred Weiss, Lars Ratzmann, Bernd Wagner, Emilio Volpi, Georgios Fakas, Ulrich Hofmann, Francesco Sechi, Martin Heller, Francesco D'Ascoli, Marco De Marinis, Hans-Joachim Quenzer, Francesco Battini, Eleonora Marchetti, Marten Oldsen, L. Bacciarelli, L. Mostardini, Joachim Janes, M. Melani
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microelectromechanical systems, Scanner, Materials science, Fabrication, business.industry, Laser, law.invention, Lissajous curve, Optics, Comb drive, law, Wafer, Projection (set theory), business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::04e3246a274bd94e31065dac2083e072
https://doi.org/10.1117/12.763433