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1دورية أكاديمية
المؤلفون: Bohyeon Kang, Jehyun An, Jongseo Park, Giryun Hong, Beomjoo Ham, Jaeseong Pyo, Sung-Min Ahn, Rock-Hyun Baek
المصدر: IEEE Access, Vol 12, Pp 110273-110282 (2024)
مصطلحات موضوعية: Co-integration, FeFET inverter, ferroelectric field-effect transistor (FeFET), front-end-of-line (FEOL), laser spike annealing, monolithic integration, Electrical engineering. Electronics. Nuclear engineering, TK1-9971
وصف الملف: electronic resource
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2دورية أكاديمية
المؤلفون: Jongseo Park, Kyeong-Keun Choi, Jehyun An, Bohyeon Kang, Hyeonseo You, Giryun Hong, Sung-Min Ahn, Rock-Hyun Baek
المصدر: IEEE Access, Vol 11, Pp 60660-60667 (2023)
مصطلحات موضوعية: Plasma-enhanced atomic layer deposition, forming gas annealing, CMOS image sensor, surface passivation, SiO₂, HfO₂, Electrical engineering. Electronics. Nuclear engineering, TK1-9971
وصف الملف: electronic resource