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المؤلفون: Evgeny Malankin, Neal V. Lafferty, Mikhail Silakov, Ekaterina Semenova, Takamitsu Komaki, Kouichi Fujii, Taisuke Miura, Gouta Niimi, Taku Yamazaki
المصدر: DTCO and Computational Patterning.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7d0c9d7b6396d725e7fe3c57149fbdf1
https://doi.org/10.1117/12.2614055 -
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المؤلفون: Hakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagiga, Georg Soumagne, Fumio Iwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Takashi Saitou
المصدر: International Conference on Extreme Ultraviolet Lithography 2021.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::860276926d6d0770d696700e646f8b85
https://doi.org/10.1117/12.2600714 -
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المؤلفون: Tsuyoshi Yamada, Hiroaki Nakarai, Hirokazu Hosoda, Yukio Watanabe, Takashi Saitou, Nishimura Yuichi, Takashi Suganuma, Yutaka Shiraishi, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Tamotsu Abe, Tatsuya Yanagiga, Gouta Niimi, Fumio Iwamoto, Shinji Nagai, Hiroaki Tomuro, Takayuki Yabu, Hiroshi Tanaka
المصدر: Extreme Ultraviolet Lithography 2020.
مصطلحات موضوعية: Physics, Semiconductor, Optics, Co2 laser, business.industry, Extreme ultraviolet lithography, Amplifier, Extreme ultraviolet, Energy conversion efficiency, business, Lithography, Power (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4c6793f59fb32351be1dc6550ee73dab
https://doi.org/10.1117/12.2574707