المؤلفون: Daniel J. Sadler, Chong H. Ahn, Anthony L. Cook, Seungug Koh, H.J. Garter

المصدر: 1996 Proceedings. Eighth Annual IEEE International Conference on Innovative Systems in Silicon.

مصطلحات موضوعية: Microelectromechanical systems, Interconnection, Fabrication, business.industry, Computer science, Semiconductor device fabrication, Batch processing, Optoelectronics, Integrated circuit packaging, Photonics, business, Telecommunications network

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8cbf10c1012743ea4cea3de9a4f60343
https://doi.org/10.1109/iciss.1996.552411