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المؤلفون: Meghali Chopra, Yin, Bailey, Gawlik, Brian, Bonnecaze, Roger T., Sidlgata V. Sreenivasan, Anshuman Cherala, Shrawan Singhal, Abed, Ovadia, Mallavarapu, Akhila
مصطلحات موضوعية: G11B5/746, H01L21/02381, Y10S977/89, Y10S977/887, Y10S977/888, B82Y40/00, H01L29/945, H01L21/02521, Computer Science::Emerging Technologies, B81C2201/0187, H01L21/02617, G03F7/0002, B81C1/00031, H01L21/3086
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::56a925a30c53b3228957b80080791114