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المؤلفون: Yeoh Andrew W, W. Han, Manvi Sharma, J. Shin, I. Post, M. Tanniru, T. Mule, Madhavan Atul, Gerald S. Leatherman, Kevin J. Fischer, Y-H. Wu, M. Sprinkle, Prasun Sinha, S. Anand, J. Steigerwald, S. Nigam, V. Souw, C. Ganpule, M. Asoro, Haran Mohit K, K-S. Lee, C. Pelto, P. Yashar, S. Samarajeewa, M. Mori, A. Tripathi, S. Kirby, C. Auth, M. Aykol, H. Hiramatsu, K. Marla, H. Jeedigunta, V. Chikarmane, M. Buehler, Nicholas J. Kybert
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: Interconnection, Materials science, business.industry, 020209 energy, 02 engineering and technology, 021001 nanoscience & nanotechnology, Electromigration, High volume manufacturing, Stack (abstract data type), Hardware_INTEGRATEDCIRCUITS, 0202 electrical engineering, electronic engineering, information engineering, Multiple patterning, Optoelectronics, Node (circuits), 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0fa7cc3fb3c8d31dc8c2da50fdf17147
https://doi.org/10.1109/iitc.2018.8430489 -
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المؤلفون: Patel Reken, P. Plekhanov, S. Rajamani, P. Reese, Conor P. Puls, Muhammet Uncuer, Rahim Kasim, E. Hwang, M. Agostinelli, M. Bost, Swaminathan Sivakumar, S. Nigam, Sanjay Natarajan, P. Charvat, S. Kosaraju, M. Prince, D. Rao, B. Song, M. Yang, S. Williams, P. Yashar, K. S. Lee, Pulkit Jain, I. Jin, Q. Fu, H. Hiramatsu, Kevin J. Fischer, Max M. Heckscher, R. McFadden, V. Chikarmane, Haran Mohit K, A. Rosenbaum, Huichu Liu, D. Bahr, C. Ganpule, C. Pelto, C. Allen
المصدر: 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM).
مصطلحات موضوعية: Interconnection, Materials science, Yield (engineering), business.industry, Electrical engineering, Volume (computing), Division (mathematics), law.invention, Capacitor, Stack (abstract data type), law, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, business, Air gap (plumbing), Multi layer
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5878d1ee61e8d33e2cf853ee2454b701
https://doi.org/10.1109/iitc-mam.2015.7325600