المؤلفون: Kitazawa, Mikito, Menon, Vivek A., Honma, Hiroaki, Hashiguchi, Gen, Toshiyoshi, Hiroshi, Suzuki, Takaaki

المصدر: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :616-619 Jan, 2022

Relation: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

المؤلفون: Shimomura, Noriko, Miyoshi, Tomoya, Ashizawa, Hisayuki, Mitsuya, Hiroyuki, Hashiguchi, Gen, Suzuki, Yuji, Toshiyoshi, Hiroshi

المصدر: 2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 2021 IEEE 20th International Conference on. :16-19 Dec, 2021

Relation: 2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)

المؤلفون: Mitsuya, Hiroyuki, Ashizawa, Hisayuki, Shimomura, Noriko, Honma, Hiroaki, Hashiguchi, Gen, Toshiyoshi, Hiroshi

المصدر: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2020 Symposium on. :1-4 Jun, 2020

Relation: 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)

المؤلفون: Mitsuya, Hiroyuki, Ashizawa, Hisayuki, Honma, Hiroaki, Hashiguchi, Gen, Toshiyoshi, Hiroshi

المصدر: 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2019 Symposium on. :1-4 May, 2019

Relation: 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)

المؤلفون: Mitsuya, Hiroyuki, Ashizawa, Hisayuki, Homma, Hiroaki, Hashiguchi, Gen, Toshiyoshi, Hiroshi

المصدر: 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2019 IEEE 32nd International Conference on. :171-174 Mar, 2019

Relation: 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)

المؤلفون: Nakanishi, Toru, Miyajima, Takeshi, Chokawa, Kenta, Araidai, Masaaki, Toshiyoshi, Hiroshi, Sugiyama, Tatsuhiko, Hashiguchi, Gen, Shiraishi, Kenji

المصدر: Appl. Phys. Lett. 117, 193902 (2020)

مصطلحات موضوعية: Condensed Matter - Materials Science, Condensed Matter - Other Condensed Matter

URL الوصول: http://arxiv.org/abs/2009.04116

المؤلفون: Honma, Hiroaki, Mitsuya, Hiroyuki, Hashiguchi, Gen, Fujita, Hiroyuki, Toshiyoshi, Hiroshi

المصدر: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :2167-2170 Jun, 2017

Relation: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

المؤلفون: Ohata, Yoshiki, Araidai, Masaaki, Ishiguro, Takuma, Mitsuya, Hiroyuki, Toshiyoshi, Hiroshi, Shibata, Yasushi, Hashiguchi, Gen, Shiraishi, Kenji

المصدر: In Materials Science in Semiconductor Processing April 2023 157

المؤلفون: Misawa, Kensuke, Tatsuhiko, Sugiyama, Hashiguchi, Gen, Fujita, Hiroyuki, Toshiyoshi, Hiroshi

المصدر: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :1071-1074 Jan, 2015

Relation: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

المؤلفون: Sugiyama, Tatsuhiko, Aoyama, Mitsuru, Kawai, Keiko, Hashiguchi, Gen

المصدر: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :1229-1232 Jan, 2014

Relation: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)