المؤلفون: Jongseok Kim, Sangwook Kwon, Youngtack Hong, Heemoon Jeong, Sanghoon Lee, Cheheung Kim, Kyongsoo Lee, Byeongkwon Ju, Insang Song

المصدر: 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on. :775-778 Jan, 2007

Relation: 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

المؤلفون: null Jongseok Kim, null Sangwook Kwon, null Youngtack Hong, null Heemoon Jeong, null Sanghoon Lee, null Cheheung Kim, null Kyongsoo Lee, null Byeongkwon Ju, null Insang Song

المصدر: 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

مصطلحات موضوعية: Microelectromechanical systems, Reconfigurable antenna, Materials science, business.industry, Coplanar waveguide, Electrical engineering, law.invention, Anodic bonding, law, Stiction, Insertion loss, Wafer, business, Voltage

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::925ad77c7dcdcf80e5c5eef4d641c815
https://doi.org/10.1109/memsys.2007.4433000

المؤلفون: Jongseok Kim, Sangwook Kwon, Youngtack Hong, Heemoon Jeong, Insang Song, Byeongkwon Ju

المصدر: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jan2009, Vol. 27 Issue 1, p1-5, 5p, 5 Diagrams, 1 Chart, 1 Graph

مصطلحات موضوعية: RADIO frequency microelectromechanical systems, ARTIFICIAL membranes, SILICON, MICROELECTROMECHANICAL systems, ELECTRIC potential

المؤلفون: Jongseok Kim, Sangwook Kwon, Youngtack Hong, Insang Song, Heemoon Jeong, Hyung Choi, Byeongkwon Ju

المصدر: Journal of Micro/Nanolithography, MEMS & MOEMS; Oct2009, Vol. 8 Issue 4, p043020-043020-6, 1p

مصطلحات موضوعية: ARTIFICIAL membranes, RADIO frequency, SWITCHING theory, SEMICONDUCTOR wafers, METAL bonding, GOLD, SILICON, ELECTRODES