المؤلفون: Ashraf, Nabil Shovon^Aff6

المساهمون: Song, Young Suh, editor^Aff1, Thoutam, Laxman Raju, editor^Aff2, Tayal, Shubam, editor^Aff3, Rahi, Shiromani Balmukund, editor^Aff4, Samuel, T. S. Arun, editor^Aff5

المصدر: Handbook of Emerging Materials for Semiconductor Industry. :253-265

المؤلفون: Ashraf, Nabil Shovon^Aff6

المساهمون: Song, Young Suh, editor^Aff1, Thoutam, Laxman Raju, editor^Aff2, Tayal, Shubam, editor^Aff3, Rahi, Shiromani Balmukund, editor^Aff4, Samuel, T. S. Arun, editor^Aff5

المصدر: Handbook of Emerging Materials for Semiconductor Industry. :241-252

المؤلفون: Li, Y., Zhu, X., Yu, S., Wu, Q.

المصدر: 2021 International Workshop on Advanced Patterning Solutions (IWAPS) Advanced Patterning Solutions (IWAPS), 2021 International Workshop on. :1-4 Dec, 2021

Relation: 2021 International Workshop on Advanced Patterning Solutions (IWAPS)

المؤلفون: Ziqi Li, Lisong Dong, Xu Ma, Yayi Wei

المصدر: Opto-Electronic Advances, Vol 7, Iss 4, Pp 1-11 (2024)

مصطلحات موضوعية: computational lithography, high-na euv lithography, source-mask co-optimization, lithography imaging model, Optics. Light, QC350-467

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2096-4579

URL الوصول: https://doaj.org/article/2feb540431a94d1194b5de2f44e7a687

المؤلفون: Gulina, Yu. S.^{Aff1, Aff2, IDS0030400X23100077_cor1}, Kudryashov, S. I., Smirnov, N. A., Kuzmin, E. V.

المصدر: Optics and Spectroscopy. 131(10):980-985

المؤلفون: Umamageswari, N., Thiruarul, D., Lavanya, M., Charles, J. William, Jaroszewicz, Rajesh, K. B.^{Aff2, IDs1259602201010y_cor6}

المصدر: Journal of Optics. 52(2):589-596

المؤلفون: Pinliang Yue, Mingyu Yang, Qingbin Jiao, Liang Xu, Xiaoxu Wang, Mingle Zhang, Xin Tan

المصدر: Sensors, Vol 24, Iss 12, p 3883 (2024)

مصطلحات موضوعية: high NA, fiber spectrometer, image plane tilt, achromatism, Chemical technology, TP1-1185

وصف الملف: electronic resource

Relation: https://www.mdpi.com/1424-8220/24/12/3883; https://doaj.org/toc/1424-8220

URL الوصول: https://doaj.org/article/5e75eaf124d8451abf3a745976a1a8e1

المؤلفون: Feldmann, Heiko, Graupner, Paul, Kurz, Peter, Kaiser, Winfried

المصدر: ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC) Solid-State Device Research Conference (ESSDERC), 2019 49th European. :61-63 Sep, 2019

Relation: ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC)

المؤلفون: Biabangard, Habib^{Aff1, IDs00710022007988_cor1}, Sepidbar, Fatemeh, Palin, Richard M., Boomeri, Mohammad, Whattam, Scott A., Homam, Seyed Masoud, Shahraki, Omol Banin

المصدر: Mineralogy and Petrology. 117(1):63-77

المؤلفون: Oda, Takuya, Hirakawa, Keisuke, Ichii, Kentaro, Aikawa, Kazuhiko

المصدر: 2017 IEEE CPMT Symposium Japan (ICSJ) CPMT Symposium Japan (ICSJ), 2017 IEEE. :51-54 Nov, 2017

Relation: 2017 IEEE CPMT Symposium Japan (ICSJ)