-
1
المؤلفون: A. Dutt, Cong Wang, M. R. Baklanov, Hilde Tielens, Srinivas Godavarthi, Patrick Verdonck, Yasuhiro Matsumoto, Iouri Koudriavtsev
المصدر: Thin Solid Films. 575:103-106
مصطلحات موضوعية: Materials science, Hydrogen, Metals and Alloys, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Dielectric, Chemical vapor deposition, Tungsten, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, X-ray reflectivity, Secondary ion mass spectrometry, chemistry, Materials Chemistry, Thin film, Fourier transform infrared spectroscopy
-
2
المؤلفون: J. A. van den Berg, T.Q.C. Noakes, Mihaela Popovici, S. Van Elshocht, M. A. Reading, Hilde Tielens, Thierry Conard, Paul Bailey, Christoph Adelmann, S. De Gendt
المصدر: Applied Surface Science. 281:8-16
مصطلحات موضوعية: Materials science, business.industry, Scattering, Gate dielectric, Analytical chemistry, Elastic energy, General Physics and Astronomy, chemistry.chemical_element, Surfaces and Interfaces, General Chemistry, Q1, Condensed Matter Physics, Surfaces, Coatings and Films, Ion, chemistry, Atom, Optoelectronics, Microelectronics, business, Tin, QC, High-κ dielectric
وصف الملف: application/pdf
-
3
المؤلفون: E. Van Besien, Thomas Witters, M. R. Baklanov, Patrick Verdonck, Annelies Delabie, Hilde Tielens, Laura Nyns, L. Farrell, S. Van Elshocht, J. Swerts
المصدر: Microelectronic Engineering. 106:81-84
مصطلحات موضوعية: Materials science, Nanotechnology, Dielectric, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Metal, Nanopore, Atomic layer deposition, Chemical engineering, Chemisorption, visual_art, visual_art.visual_art_medium, Deposition (phase transition), Electrical and Electronic Engineering, Thin film, Porosity
-
4
المؤلفون: Johan Meersschaut, Guinther Kellerman, S. Gomes dos Santos Filho, M. R. Baklanov, Hilde Tielens, Annelies Delabie, S. Van Elshocht, J. Swerts, Alexis Franquet, A Maheshwari, J. Loyo Prado, Thierry Conard, Akira Uedono, Danilo Roque Huanca, Thomas Witters, Sven Dewilde, Silvia Armini, Pascal Verdonck
المصدر: ECS Journal of Solid State Science and Technology. 2:N103-N109
مصطلحات موضوعية: Atomic layer deposition, Materials science, Analytical chemistry, Plasma, Electronic, Optical and Magnetic Materials
-
5
المؤلفون: Sven Van Elshocht, Johan Swerts, Hugo Bender, K. Tomida, Mihaela Ioana Popovici, Olivier Richard, Thierry Conard, Hilde Tielens, Massimo Tallarida, Johan Meersschaut, Christoph Adelmann, Malgorzata Jurczak, Jaap Van den Berg, Dieter Schmeisser, Alexis Franquet, Annelies Delabie, Min-Soo Kim
المصدر: ECS Journal of Solid State Science and Technology. 2:N23-N27
مصطلحات موضوعية: Anatase, X-ray absorption spectroscopy, Materials science, Absorption spectroscopy, Inorganic chemistry, Analytical chemistry, chemistry.chemical_element, Electronic, Optical and Magnetic Materials, Ruthenium, Secondary ion mass spectrometry, Atomic layer deposition, chemistry, Thin film, Titanium
-
6
المؤلفون: Erica Iacob, Hilde Tielens, Massimo Bersani, M. A. Reading, Christoph Adelmann, Mihaela Popovici, J. A. van den Berg, Mario Barozzi
المصدر: Surface and Interface Analysis. 45:394-397
مصطلحات موضوعية: Materials science, Silicon, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, General Chemistry, Substrate (electronics), Surface finish, Dielectric, Condensed Matter Physics, Surfaces, Coatings and Films, Characterization (materials science), Secondary ion mass spectrometry, chemistry, Materials Chemistry, Tin, Layer (electronics)
-
7
المؤلفون: Marc Schaekers, Michael Toeller, Thierry Conard, Alexis Franquet, Peter Antony Premkumar, Sven Van Elshocht, Olivier Richard, Alain Moussa, Hilde Tielens, Christoph Adelmann, Johan Meersschaut, Bert Brijs, Malgorzata Jurczak, Hugo Bender, Jorge A. Kittl
المصدر: Chemical Vapor Deposition. 18:61-69
مصطلحات موضوعية: Materials science, Ozone, Process Chemistry and Technology, Inorganic chemistry, Non-blocking I/O, Surfaces and Interfaces, General Chemistry, Microstructure, Atomic layer deposition, chemistry.chemical_compound, Adsorption, Chemical engineering, chemistry, Wafer, Crystallite, Thin film
-
8
المؤلفون: Johan Meersschaut, Sven Dewilde, Annelies Delabie, Hilde Tielens, Sven Van Elshocht, Thomas Witters, Patrick Verdonck, Johan Swerts, E. Vancoille
المصدر: ECS Transactions. 41:25-32
مصطلحات موضوعية: Materials science, Chemical engineering, Low-k dielectric, Porosity, Deposition (chemistry)
-
9
المؤلفون: Alain Moussa, Hugo Bender, Jorge A. Kittl, Olivier Richard, L. Altimime, Mihaela Popovici, Johan Swerts, Thierry Conard, Sven Van Elshocht, Alexis Franquet, Hilde Tielens, K. Tomida, Min-Soo Kim
المصدر: Microelectronic Engineering. 88:1517-1520
مصطلحات موضوعية: Permittivity, Anatase, Materials science, Analytical chemistry, Equivalent oxide thickness, Dielectric, Substrate (electronics), Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Ruthenium oxide, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Atomic layer deposition, Electrical and Electronic Engineering, High-κ dielectric
-
10
المؤلفون: Karl Opsomer, Laurent Breuil, Jorge A. Kittl, Bert Brijs, Mihaela Popovici, J. Van Houdt, S. Van Elshocht, Hilde Tielens, J. Swerts, Hugo Bender, Johan Meersschaut, A. Cacciato, Christoph Adelmann, Valery V. Afanas'ev, O. Richard, Geoffrey Pourtois, Malgorzata Jurczak, Thierry Conard
المصدر: Journal of The Electrochemical Society. 158:H778-H784
مصطلحات موضوعية: Non-volatile memory, Lanthanide, Materials science, Renewable Energy, Sustainability and the Environment, Materials Chemistry, Electrochemistry, Nanotechnology, Dielectric, Condensed Matter Physics, Flash memory, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials