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المؤلفون: Syed Naime Mohammad, Sven Boese, Philip Groeger, Holger Bald, Alberto Lopez-Gomez, Clemens Utzny, Stefan Buhl
المصدر: Optical and EUV Nanolithography XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b9fd96c48c1c28ef88238a20b6d8f574
https://doi.org/10.1117/12.2657970 -
2
المؤلفون: Tobias Hoeer, Hyeon-Jun Ha, Seon-ho Lee, Seop Kim, Holger Bald, Jang-Sun Kim, Boris Habets, Enrico Bellmann
المصدر: Optical Microlithography XXXIII.
مصطلحات موضوعية: Variation (linguistics), Computer science, Line (geometry), Electronic engineering, Wafer, Overlay, Throughput (business), Field (computer science)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::17aa6d2814e8960937ab604ba7e4e007
https://doi.org/10.1117/12.2552735 -
3
المؤلفون: Stefan Buhl, Patrick Lomtscher, Holger Bald, Boris Habets, Tobias Hoeer, Wan-Soo Kim
المصدر: Optical Microlithography XXXIII.
مصطلحات موضوعية: Polynomial, Computer science, Sampling (statistics), Wafer, Overlay, Edge (geometry), Lithography, Algorithm, Field (computer science), Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2c8ea14aefe263da8b329caf6add6b1d
https://doi.org/10.1117/12.2552714 -
4
المؤلفون: Holger Bald, Arthur Hotzel
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering drawing, Engineering, business.industry, Electronic engineering, Reticle, Wafer, Grey scale, business, Image resolution
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9164ab65df1de0a3d128eb0d9a66999b
https://doi.org/10.1117/12.923649 -
5
المؤلفون: Rolf Seltmann, Dieter Woischke, Paul van Adrichem, Matthias Ruhm, Holger Bald, Marc Noot, Paul Frank Luehrmann, Karsten Bubke
المصدر: 27th European Mask and Lithography Conference.
مصطلحات موضوعية: Scanner, Engineering, Matching (statistics), Software, business.industry, Line (geometry), Process (computing), Computer vision, Node (circuits), Artificial intelligence, business, High volume manufacturing, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a8a5cda4c80902a6c4d3f5d44903d79e
https://doi.org/10.1117/12.886120