المؤلفون: Garigapati, N.S., Lindelow, F., Sodergren, L., Lind, E.

المصدر: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 68(8):3762-3767 Aug, 2021

المؤلفون: Verma, A., Borisov, K., Connaughton, S., Stamenov, P.

المصدر: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 67(11):5201-5208 Nov, 2020

المؤلفون: Sun, Xiao, Ye, Shengwei, Seddon, James, Renaud, Cyril C., Hou, Lianping, Marsh, John H.

المصدر: 2021 IEEE Photonics Conference (IPC) Photonics Conference (IPC),2021 IEEE. :1-2 Oct, 2021

Relation: 2021 IEEE Photonics Conference (IPC)

المؤلفون: A.K. Sahoo, P.-H. Chen, C.-H. Lin, R.-S. Liu, B.-J. Lin, T.-S. Kao, P.-W. Chiu, T.-P. Huang, W.-Y. Lai, J. Wang, Y.-Y. Lee, C.-K. Kuan

المصدر: Micro and Nano Engineering, Vol 20, Iss , Pp 100215- (2023)

مصطلحات موضوعية: EUV interference lithography, Transmission grating mask, Line/space patterns, Half-pitch (HP), Hydrogen silsesquioxane (HSQ), Slits (SL), Electronics, TK7800-8360, Technology (General), T1-995

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S259000722300045X; https://doaj.org/toc/2590-0072

URL الوصول: https://doaj.org/article/17765dce46814cdeb6793697e9abd2e4

المؤلفون: Jiho Kim, Jin-Kyun Lee, Boknam Chae, Jinho Ahn, Sangsul Lee

المصدر: Nano Convergence, Vol 9, Iss 1, Pp 1-10 (2022)

مصطلحات موضوعية: Nanoscale chemical visualization, Hydrogen silsesquioxane (HSQ), Infrared nanoscopy, Scattering-type scanning near-field optical microscope (s-SNOM), Photoreaction, Photoresist, Technology, Chemical technology, TP1-1185, Biotechnology, TP248.13-248.65, Science, Physics, QC1-999

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2196-5404

URL الوصول: https://doaj.org/article/1eaa32e2edfb4e94872750a71e7f1a6a

المؤلفون: Kim, Jiho, Lee, Jin-Kyun, Chae, Boknam, Ahn, Jinho^{Aff3, IDs40580022003453_cor4}, Lee, Sangsul^{Aff1, IDs40580022003453_cor5}

المصدر: Nano Convergence. 9(1)

المؤلفون: Min, Zhao, Baoqin, Chen, Changqing, Xie, Ming, Liu, Jiebing, Nie

المصدر: 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on. :1021-1024 Jan, 2010

Relation: 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

المؤلفون: Chung, J. W., Piner, E. L., Palacios, T.

المصدر: IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 30(2):113-116 Feb, 2009

المؤلفون: Cornu-Fruleux, F., Penaud, J., Dubois, E., Coronel, P., Larrieu, G., Skotnicki, T.

المصدر: IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 28(6):523-526 Jun, 2007

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