نتائج البحث - "Ichiko Misumi"

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دورية أكاديمية

Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM

المؤلفون: Ichiko Misumi, Ryosuke Kizu, Kentaro Sugawara, Akiko Hirai, Satoshi Gonda

المصدر: Measurement: Sensors, Vol 18, Iss , Pp 100092- (2021)

مصطلحات موضوعية: Areal surface roughness, AFM, Probe-tip error, Electric apparatus and materials. Electric circuits. Electric networks, TK452-454.4

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2665917421000556; https://doaj.org/toc/2665-9174

URL الوصول: https://doaj.org/article/641a019cbebc4a19bdd2ae1813839ae4

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2

Photoresist shrinkage observation by a metrological tilting-AFM

المؤلفون: Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

المصدر: Metrology, Inspection, and Process Control XXXVII.

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b400619a915c7dae2cc8392d4d554d90
https://doi.org/10.1117/12.2655566

3

ガードバンド・セミナー

المؤلفون: Naoto KAWABE, Ichiko MISUMI

المصدر: Journal of the Japan Society for Precision Engineering. 87:845-848

مصطلحات موضوعية: Mechanical Engineering

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4d9a8f5ee78b4d61042ecde4a321aee8
https://doi.org/10.2493/jjspe.87.845

4

Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

المؤلفون: Kazuhiro Kumagai, Ichiko Misumi, Ryosuke Kizu, Keita Kobayashi, Hiroshi Itoh, Tomoo Sigehuzi

المصدر: Nanomanufacturing and Metrology. 5:83-90

مصطلحات موضوعية: Microscope, Materials science, law, Transmission electron microscopy, Scanning electron microscope, Mechanical Engineering, Materials Science (miscellaneous), Microscopy, Nanotechnology, Electron, Industrial and Manufacturing Engineering, law.invention, Metrology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::75b65d1c945905fcd9362ee40c61aaad
https://doi.org/10.1007/s41871-021-00119-1

Find this article in full text from Springer Verlag.

5

Calibration of Step Height Standard Using Metrological Atomic Force Microscope

المؤلفون: Ichiko Misumi

المصدر: Journal of the Japan Society for Precision Engineering. 87:744-747

مصطلحات موضوعية: Materials science, Optics, Atomic force microscopy, business.industry, Mechanical Engineering, Calibration, Step height, business, Metrology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f64750d5c25132fa7640c3cd68266b23
https://doi.org/10.2493/jjspe.87.744

6

High-resolution sidewall observation and LER measurement of a photoresist pattern by a metrological tilting-AFM

المؤلفون: Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

المصدر: Metrology, Inspection, and Process Control XXXVI.

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::006323f234e309a623ae02bd75fb9eee
https://doi.org/10.1117/12.2614122

7

Unbiased line edge roughness measurement using profile-averaging method for precise roughness parameters measurement

المؤلفون: Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

المصدر: Journal of Micro/Nanopatterning, Materials, and Metrology. 21

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::050288db9396ecd6ad1f1cc1bd2ed0ca
https://doi.org/10.1117/1.jmm.21.2.024001

8

Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique

المؤلفون: Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda

المصدر: Journal of Applied Physics. 133:065302

مصطلحات موضوعية: General Physics and Astronomy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2a090535b2994236b673dabb82947b4f
https://doi.org/10.1063/5.0130459

Find this article in full text from Scitation.

9

Effect of specimen processing for transmission electron microscopy on lattice spacing variation in Si specimens

المؤلفون: Keita Kobayashi, Ichiko Misumi, Kazuhiro Yamamoto

المصدر: Ultramicroscopy. 238

مصطلحات موضوعية: Instrumentation, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e33463c3f8ec0fc84cd29bd51ed45778
https://pubmed.ncbi.nlm.nih.gov/35512576

View record from ScienceDirect

10

Traceable Atomic Force Microscope for Surface Roughness Calibration of Sub-Nanometer Order

المؤلفون: Satoshi Gonda, Akiko Hirai, Ryosuke Kizu, Ichiko Misumi

المصدر: Journal of the Japan Society for Precision Engineering. 85:1013-1019

مصطلحات موضوعية: Materials science, business.industry, Atomic force microscopy, Mechanical Engineering, Calibration, Surface roughness, Optoelectronics, Nanometre, business, Stability (probability)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7951da7406c2517e3885c1fa0b9e7e26
https://doi.org/10.2493/jjspe.85.1013

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