يعرض 1 - 10 نتائج من 20,821 نتيجة بحث عن '"Ion etching"', وقت الاستعلام: 1.06s تنقيح النتائج
  1. 1
    مؤتمر
    Fabrication of Nano-Scale Features using Non-Dedicated EBL and Capacitively Coupled RIE

    المؤلفون: Bala, Rajni, Naresh, Balla, Sen, Mrinal

    المصدر: 2024 IEEE International Conference on Interdisciplinary Approaches in Technology and Management for Social Innovation (IATMSI) Interdisciplinary Approaches in Technology and Management for Social Innovation (IATMSI), 2024 IEEE International Conference on. 2:1-5 Mar, 2024

    Relation: 2024 IEEE International Conference on Interdisciplinary Approaches in Technology and Management for Social Innovation (IATMSI)

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  2. 2
    دورية أكاديمية
    Conformally Overlaid Ferromagnetic Shadow Masks for Etching and Deposition Processes

    المؤلفون: Choi, M., Kim, T., Lee, B.J., Song, J., Lee, J.

    المصدر: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 33(2):124-126 Apr, 2024

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  3. 3
    دورية أكاديمية
    50 Years of Reactive Ion Etching in Microelectronics

    المؤلفون: Voronin, S., Vallee, C.

    المصدر: IEEE Transactions on Materials for Electron Devices IEEE Trans. Mat. Electron Devices Materials for Electron Devices, IEEE Transactions on. 1:49-63 2024

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  4. 4
    دورية أكاديمية
    4H-Silicon Carbide as an Acoustic Material for MEMS

    المؤلفون: Long, Y., Liu, Z., Ayazi, F.

    المصدر: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Trans. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on. 70(10):1189-1200 Oct, 2023

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  5. 5
    دورية أكاديمية
    Multi-cycle Chamber Conditioning for Plasma Etching of SiO2: From Optimization to Stability in Lot Processing

    المؤلفون: Nawaz, AliAff1, IDs11090024104935_cor1, Cian, Alessandro, Ferrario, Lorenza, Picciotto, Antonino

    المصدر: Plasma Chemistry and Plasma Processing. 44(5):1991-2009

    Find this article in full text from Springer Verlag. Full Text Finder
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  6. 6
    دورية أكاديمية
    The oxygen plasma etching behavior onto diamond-like carbon coating for micro-texturing: Experimental and molecular dynamics study

    المؤلفون: Yunata, Ersyzario EdoAff1, IDs43579024006059_cor1, Suaebah, Evi, Arifin, Rizal

    المصدر: MRS Communications. 14(4):686-692

    Find this article in full text from Springer Verlag.
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  7. 7
    مؤتمر
    A Lightweight Micromirror Made of Atomic-Layer-Deposition Alumina and Silicon with a High Aspect-Ratio Stiffening Structure

    المؤلفون: Tung, Nguyen Thanh, Sasaki, Takashi, Greif, Daniel, Smyth, Katie, Lamansky, Sergey, Hane, Kazuhiro

    المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1441-1444 Jun, 2023

    Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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  8. 8
    دورية أكاديمية
    New Developments in Amorphous Silicon-Based Microchannel Plates

    المؤلفون: Frey, S., Antognini, L., Beygi, M., Ballif, C., Wyrsch, N.

    المصدر: IEEE Transactions on Nuclear Science IEEE Trans. Nucl. Sci. Nuclear Science, IEEE Transactions on. 70(9):2226-2233 Sep, 2023

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  9. 9
    دورية أكاديمية
    High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror

    المؤلفون: Tung, N.T., Saito, S., Sasaki, T., Greif, D., Parsons, M.F., Holmes, S., Hane, K.

    المصدر: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(4):352-361 Aug, 2023

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  10. 10
    مؤتمر
    Micro-patterning of aluminium-induced crystalline-silicon through reactive ion etching to fabricate pressure-sensing devices

    المؤلفون: Arun, Anand Ratna, Kumar, Gourav, Dusane, Rajiv O.

    المصدر: 2023 IEEE 3rd International Conference on Technology, Engineering, Management for Societal impact using Marketing, Entrepreneurship and Talent (TEMSMET) Technology, Engineering, Management for Societal impact using Marketing, Entrepreneurship and Talent (TEMSMET), 2023 IEEE 3rd International Conference on. :1-5 Feb, 2023

    Relation: 2023 IEEE 3rd International Conference on Technology, Engineering, Management for Societal impact using Marketing, Entrepreneurship and Talent (TEMSMET)

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