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1مؤتمر
المؤلفون: Abe, Yosuke, Akanuma, Goichi, Shinkawa, Mizuki, Hashiguchi, Tsuyoshi, Sato, Masaaki, Suzuki, Shuichi, Sakai, Atsushi, Ishimoto, Yukiyoshi
المصدر: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :1007-1010 Jan, 2024
Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)