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1
المؤلفون: Ao Chen, Nikhil Jain, Steve McDermott, Yee Mei Foong, Jae Yeol Maeng
المصدر: Optical Microlithography XXXI.
مصطلحات موضوعية: Materials science, business.industry, Process (computing), 02 engineering and technology, Photoresist, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, Tone (musical instrument), Resist, 0103 physical sciences, Optoelectronics, sense organs, 0210 nano-technology, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e6b45fb756d422150c4f757425a92cef
https://doi.org/10.1117/12.2297376 -
2
المؤلفون: Jae Yeol Maeng, Young Eun Cho, Suklyun Hong, Sehun Kim
المصدر: The Journal of Physical Chemistry B. 108:15229-15232
مصطلحات موضوعية: Silicon, Ab initio, chemistry.chemical_element, Electronic structure, Surfaces, Coatings and Films, Pseudopotential, Crystallography, chemistry.chemical_compound, Adsorption, chemistry, Computational chemistry, Pyridine, Materials Chemistry, Molecule, Physical and Theoretical Chemistry
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3
المؤلفون: Young Eun Cho, Jae Yeol Maeng, Sehun Kim, Ansoon Kim, Jun Young Lee
المصدر: The Journal of Chemical Physics. 118:1929-1936
مصطلحات موضوعية: Chemistry, Thermal desorption spectroscopy, Kinetics, Analytical chemistry, Thermal desorption, General Physics and Astronomy, Activation energy, Soft laser desorption, law.invention, law, Desorption, Physical and Theoretical Chemistry, Scanning tunneling microscope, Surface reconstruction
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4
المؤلفون: Jun Young Lee, Sehun Kim, Ansoon Kim, Jae Yeol Maeng
المصدر: The Journal of Chemical Physics. 117:10215-10222
مصطلحات موضوعية: Thermal desorption spectroscopy, Dimer, Thermal desorption, Analytical chemistry, General Physics and Astronomy, Electronic structure, law.invention, chemistry.chemical_compound, Adsorption, Acetylene, chemistry, law, Desorption, Physical and Theoretical Chemistry, Scanning tunneling microscope
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5
المؤلفون: Sehun Kim, Jae Yeol Maeng
المصدر: Surface Science. :1445-1450
مصطلحات موضوعية: Silicon, Hydrogen, Dimer, chemistry.chemical_element, Surfaces and Interfaces, Hydrogen atom, Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, Crystallography, chemistry.chemical_compound, chemistry, law, Materials Chemistry, Perpendicular, Scanning tunneling microscope, Carbon, Surface reconstruction
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6
المؤلفون: Sehun Kim, Yu-Kwon Kim, Jae Yeol Maeng, Sung Yong Lee
المصدر: Applied Surface Science. 174:316-323
مصطلحات موضوعية: Auger electron spectroscopy, Low-energy electron diffraction, Chemistry, Analytical chemistry, Nucleation, General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, Substrate (electronics), Condensed Matter Physics, Surfaces, Coatings and Films, Crystallography, Transition metal, Monolayer, Thin film, Deposition (law)
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7
المؤلفون: Sam K. Jo, Jae Yeol Maeng, Soon Jung Jung, Young Eun Cho, Sehun Kim, Jun Young Lee
المصدر: Applied Physics Letters. 84:5028-5030
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Scanning electron microscope, Dimer, Analytical chemistry, chemistry.chemical_element, Germanium, Atomic units, law.invention, Crystallography, chemistry.chemical_compound, chemistry, law, Etching (microfabrication), Atom, Scanning tunneling microscope, Electron microscope
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8
المؤلفون: Sam K. Jo, Sehun Kim, Jae Yeol Maeng, Young Eun Cho, Jun Young Lee
المصدر: Applied Physics Letters. 81:3555-3557
مصطلحات موضوعية: Physics and Astronomy (miscellaneous), Hydrogen, Chemistry, Dangling bond, chemistry.chemical_element, Germanium, law.invention, Crystallography, Adsorption, Chemical bond, law, Phase (matter), Monolayer, Scanning tunneling microscope
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9
المؤلفون: Sam K. Jo, J. M. White, Jae Yeol Maeng, W. P. Fitts, Sehun Kim
المصدر: Applied Physics Letters. 79:36-38
مصطلحات موضوعية: Physics and Astronomy (miscellaneous), Silicon, Hydrogen, Analytical chemistry, Thermal desorption, chemistry.chemical_element, Substrate (electronics), law.invention, chemistry, law, Desorption, Etching, Absorption (chemistry), Scanning tunneling microscope
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10
المؤلفون: Daniel Fischer, Jae Yeol Maeng, James M. Oberschmidt, Yong Wah Cheng, Wei Lu, Cyrus E. Tabery, Charles N. Archie, Geng Han
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Optics, Optical proximity correction, business.industry, Computer science, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Calibration, Computer vision, Wafer, Artificial intelligence, business, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::55db34eb83e3087bd4244ca5ad1c1470
https://doi.org/10.1117/12.775444