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المؤلفون: Justin Clements, Vandana Venkatasubramanian, Christa Montgomery, Eswar Ramanathan, Jeffrey Riendeau, Veenadhar Katragadda, Alan Cusick, Edwin Soler, Qiushi Wang, Jay Mody, Lloyd Smith, Arthur Gasasira, Shafaat Ahmed, Colin Bombardier, Petrov Nicolai, Bill Evans, Raymond Krom, Martin Muthee, Michael Hatzistergos, Owen Brown, Jung Tae Hwang, Jian Qiu, Vincent Liao, Kok Hin Teo
المصدر: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Computer science, Semiconductor device fabrication, Data integrity, Contact resistance, Process (computing), Wafer, Upstream (networking), Root cause, Automotive engineering, Line (electrical engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ff7464b8c4d2cfd95d8c83042d070e96
https://doi.org/10.1109/asmc.2019.8791826 -
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المؤلفون: Joseph F. Shepard, Henrik Johanson, Vandana Venkatasubramanian, Jay Mody, Takmeel Qanit, Ashwini Chandrasekar, Eswar Ramanathan, Craig Child, AnbuSelvam Km Mahalingam, Lei Jiang, Brett T. Cucci, Alycia Roux, O'brien Brendan, Christa Montgomery, Bradley Morganfeld, Keith Donegan, Colin Bombardier, Sang-Kee Eah, Vijaya Rana, Ghosh Somnath, Daniel Damjanovic, Anirvan Sircar, Zhiguo Sun, Singh Sunil K, Rebekah Sheraw, Ordonio Christopher, Silvestre MaryClaire, Adam DaSilva
المصدر: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Materials science, Etching (microfabrication), Chemical-mechanical planarization, Technology scaling, Nanotechnology, Thin film, Hard mask
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3b80f0efb35ac3f6be7ae230059a989a
https://doi.org/10.1109/asmc.2019.8791788 -
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المؤلفون: Jochonia Nxumalo, Jay Mody
المصدر: Electrical Atomic Force Microscopy for Nanoelectronics ISBN: 9783030156114
مصطلحات موضوعية: Profiling (computer programming), Focus (computing), Computer science, law, Doping, Electronic engineering, Scanning capacitance microscopy, Semiconductor device, Integrated circuit, Chip, Failure mode and effects analysis, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::72bf5a05002f28568dd86032c616aa86
https://doi.org/10.1007/978-3-030-15612-1_4 -
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المؤلفون: Frieder H. Baumann, Jay Mody, Anita Madan, Steven E. Molis, Scott Pozder, Michael Hatzistergos, Pradip Sairam Pichumani, Tanya A. Atanasova
المصدر: International Symposium for Testing and Failure Analysis.
مصطلحات موضوعية: Materials science, business.industry, Optoelectronics, Wafer, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::70927e55116a0630b9f202c5bea33fe4
https://doi.org/10.31399/asm.cp.istfa2018p0001 -
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المؤلفون: Ashwini Chandrashekar, Jinping Liu, Bharat Krishnan, M. Gribelyuk, A. Zainuddin, Kassim Joseph K, T. J. Tang, Zhiguo Sun, J. Yang, Eswar Ramanathan, Shishir Ray, Ritesh Ray Chaudhuri, Tian Shen, Jay Mody, Huang Liu, Anbu Selvam Km Mahalingam, Kong Boon Yeap, Linjun Cao, Rinus T. P. Lee, Ryan Sporer, D. Damjanovic, N. Petrov
المصدر: 2018 IEEE Symposium on VLSI Technology.
مصطلحات موضوعية: Interconnection, Materials science, business.industry, Annealing (metallurgy), Dielectric, Nanosecond, Laser, Capacitance, law.invention, Grain growth, law, Optoelectronics, Nanosecond laser, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0dd407cc68abf63f0ac888a120bb66aa
https://doi.org/10.1109/vlsit.2018.8510651 -
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المؤلفون: Ajay Kumar Kambham, Jay Mody, Andreas Schulze, Pierre Eyben, Matthieu Gilbert, Wilfried Vandervorst
المصدر: physica status solidi c. 11:121-129
مصطلحات موضوعية: Spreading resistance profiling, Dopant, Chemistry, business.industry, Nanowire, Nanotechnology, Blanket, Condensed Matter Physics, Metrology, Secondary ion mass spectrometry, Planar, Optoelectronics, Sensitivity (control systems), business
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المؤلفون: Jay Mody, Pierre Eyben, Hugo Bender, Aftab Nazir, Trudo Clarysse, Kristin De Meyer, Andreas Schulze, Wilfried Vandervorst, Geert Hellings
المصدر: Solid-State Electronics. 74:38-42
مصطلحات موضوعية: Materials science, Spreading resistance profiling, business.industry, Ultra-high vacuum, Process (computing), High resolution, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Software, Optics, Microscopy, Materials Chemistry, Calibration, Electrical and Electronic Engineering, Process simulation, business, Simulation
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المصدر: Ultramicroscopy. 111:535-539
مصطلحات موضوعية: Materials science, Dopant, business.industry, Doping, Transistor, Insulator (electricity), Nanotechnology, Atom probe, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Metrology, law.invention, Secondary ion mass spectrometry, Semiconductor, law, Optoelectronics, business, Instrumentation
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المؤلفون: Thomas Hantschel, Kris Vanstreels, Wilfried Vandervorst, Geoffrey Pourtois, Kiroubanand Sankaran, Jay Mody, Pierre Eyben, Liangchi Zhang, Trudo Clarysse, Francesca Clemente, Edouard Duriau, Kausala Mylvaganam
المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 28:401-406
مصطلحات موضوعية: Applied physics, Silicon, Spreading resistance profiling, business.industry, Chemistry, Process Chemistry and Technology, Doping, Ultra-high vacuum, chemistry.chemical_element, Nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Indentation, Microscopy, Materials Chemistry, Optoelectronics, Electrical and Electronic Engineering, Deformation (engineering), business, Instrumentation
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المؤلفون: Pierre Eyben, Jay Mody, Aftab Nazir, Andreas Schulze, Trudo Clarysse, Thomas Hantschel, Wilfried Vandervorst
المصدر: Fundamentals of Picoscience ISBN: 9781466505094
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4a7da0a812614489024cecbbf4f5ecff
https://doi.org/10.1201/b15523-46