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1دورية أكاديمية
المؤلفون: Sivaramakrishnan Ramesh, Arjun Ajaykumar, Lars-Åke Ragnarsson, Laurent Breuil, Gabriel Khalil El Hajjam, Ben Kaczer, Attilio Belmonte, Laura Nyns, Jean-Philippe Soulié, Geert Van den bosch, Maarten Rosmeulen
المصدر: Micromachines, Vol 12, Iss 9, p 1084 (2021)
مصطلحات موضوعية: work function, effective work function, dipole, metal gate, high-k, SiO2, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource
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2
المؤلفون: Valeria Founta, Jean-Philippe Soulié, Ingrid De Wolf, Joris Van De Vondel, Johan Swerts, Zsolt Tőkei, Christoph Adelmann
المصدر: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3f499888afa2f7d5bed2bb72827541c9
https://doi.org/10.1109/edtm55494.2023.10103023 -
3
المؤلفون: Valeria Founta, Jean-Philippe Soulié, Kiroubanand Sankaran, Kris Vanstreels, Karl Opsomer, Pierre Morin, Pieter Lagrain, Alexis Franquet, Danielle Vanhaeren, Thierry Conard, Johan Meersschaut, Christophe Detavernier, Joris Van de Vondel, Ingrid De Wolf, Geoffrey Pourtois, Zsolt Tőkei, Johan Swerts, Christoph Adelmann
المصدر: SSRN Electronic Journal.
مصطلحات موضوعية: History, Polymers and Plastics, General Materials Science, Business and International Management, Industrial and Manufacturing Engineering
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::956d2de7d2438d87c22d241aaaaec21e
https://doi.org/10.2139/ssrn.4048681 -
4
المؤلفون: Qais Saadeeh, Meiyi Wu, Vicky Philipsen, Philipp Naujok, Jean-Philippe Soulié, Robbert Wilhelmus Elisabeth van de Kruijs, Richard Ciesielski, Karl Opsomer, Michael Kolbe, Victor Soltwisch, Frank Scholze
المصدر: Modeling Aspects in Optical Metrology VIII.
مصطلحات موضوعية: Range (particle radiation), Optics, Materials science, Beamline, Field (physics), Scattering, business.industry, Extreme ultraviolet lithography, Thin film, business, Lithography, Semimetal
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b48493e0309b4e64ca7928fe95cfaaf2
https://doi.org/10.1117/12.2592543 -
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المؤلفون: Meiyi Wu, Vicky Philipsen, Patrick Jaenen, Philipp Naujok, Qais Saadeh, Laurent Souriau, Andreas Erdmann, Hazem Mesilhy, Devesh Thakare, Jean-Philippe Soulié, Jean-Francois de Marneffe, Markus Foltin, Karl Opsomer, Victor Soltwisch
المصدر: Journal of Micro/Nanopatterning, Materials, and Metrology. 20
مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Nanoimprint lithography, law.invention, law, Extreme ultraviolet, Optoelectronics, Photomask, Reactive-ion etching, Photolithography, business, Absorption (electromagnetic radiation), Refractive index
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d5eab56af96281f6e2209e21b52845ba
https://doi.org/10.1117/1.jmm.20.2.021002 -
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المؤلفون: Jean-Philippe Soulié, Karl Opsomer, Jean-Francois de Marneffe, Philipp Naujok, Devesh Thakare, Markus Foltin, Qais Saadeh, Victor Soltwisch, Andreas Erdmann, Hazem Mesilhy, Laurent Souriau, Meiyi Wu, Vicky Philipsen, Patrick Jaenen
المصدر: Extreme Ultraviolet Lithography 2020
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Extreme ultraviolet lithography, 01 natural sciences, Refraction, 010309 optics, Wavelength, Etching, 0103 physical sciences, Optoelectronics, Reactive-ion etching, Thin film, business, Absorption (electromagnetic radiation), Refractive index
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::22d3c4cdc6f35c40c3399935f626d790
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7
المؤلفون: Sara, Frost, Samuel, Guérin, Brian E, Hayden, Jean-Philippe, Soulié, Chris, Vian
المصدر: ACS combinatorial science. 20(7)
مصطلحات موضوعية: Oxygen, Small Molecule Libraries, Samarium, Silicon, Hot Temperature, Luminescent Agents, Europium, Light, Barium, Luminescent Measurements, Aluminum Oxide, Combinatorial Chemistry Techniques, Oxides
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8
المؤلفون: Denis M. Pasero, Jean-Philippe Soulié, Brian Hayden
المصدر: ECS Meeting Abstracts. :373-373