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المؤلفون: Jing Kang Ba, Xiao Jing Wang, Yun Zhang
المصدر: Key Engineering Materials. 807:63-67
مصطلحات موضوعية: Materials science, Mechanical Engineering, 02 engineering and technology, Sputter deposition, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Chemical engineering, Mechanics of Materials, General Materials Science, Thin film, 0210 nano-technology, Quartz, Deposition (chemistry)