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1
المؤلفون: Joel Voyer, Francois Gitzhofer, Maher I. Boulos, Josee Dionne
المصدر: Proceeding of Progress in Plasma Processing of Materials 1997.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7c96fbd8513ec169e26cb86325175e8a
https://doi.org/10.1615/itppc-1996.340