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1
المؤلفون: Benjamin Mooney, Chad S. Korach, Joseph A. Levert, Franklin Lynam
المصدر: ECS Journal of Solid State Science and Technology. 8:P787-P793
مصطلحات موضوعية: chemistry.chemical_compound, Materials science, chemistry, Chemical-mechanical planarization, Oxide, Particle, Composite material, Contact area, Electronic, Optical and Magnetic Materials
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2
المؤلفون: Christopher McGowan, Joseph A Levert
مصطلحات موضوعية: bepress|Engineering, bepress|Engineering|Mechanical Engineering|Tribology, ECSarXiv|Engineering|Mechanical Engineering|Tribology, ECSarXiv|Engineering|Mechanical Engineering, bepress|Engineering|Mechanical Engineering, ECSarXiv|Engineering
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b9e70de3aac105c4e333fa0683509d4c
https://ecsarxiv.org/938zb -
3
المؤلفون: Chad S. Korach, Joseph A. Levert
المصدر: Tribology Transactions. 52:256-261
مصطلحات موضوعية: Materials science, Mechanical Engineering, Abrasive, Polishing, Dielectric, Surfaces and Interfaces, Surfaces, Coatings and Films, Rubbing, Mechanics of Materials, Chemical-mechanical planarization, Slurry, Forensic engineering, Particle, Composite material, Contact area, Tribometer, Asperity (materials science)
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4
المؤلفون: Joseph A. Levert, Andy Grosso
المصدر: Proceedings of the 2014 Zone 1 Conference of the American Society for Engineering Education.
مصطلحات موضوعية: Outreach, Engineering, Engineering management, business.industry, Assistive technology, Goodwill, Service-learning, Capstone, business, Clothing, Productivity, Task (project management)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ead247f4571a2be2411bf404ce2a443d
https://doi.org/10.1109/aseezone1.2014.6820661 -
5
المؤلفون: Steven Danyluk, John A. Tichy, Joseph A. Levert
المصدر: Journal of Tribology. 122:450-457
مصطلحات موضوعية: Leading edge, Materials science, Silicon, Mechanical Engineering, Polishing, chemistry.chemical_element, Surfaces and Interfaces, Surface finish, Surfaces, Coatings and Films, Contact mechanics, chemistry, Mechanics of Materials, Slurry, Forensic engineering, Wafer, Composite material, Asperity (materials science)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::861e1e0704ea0e58c706955b94570443
https://doi.org/10.1115/1.555381 -
6
المؤلفون: Steven Danyluk, Lei Shan, Lorne Meade, Joseph A. Levert, John A. Tichy
المصدر: Journal of Tribology. 122:539-543
مصطلحات موضوعية: Pressure drop, Materials science, Mechanical Engineering, Mechanical engineering, Polishing, Fluid mechanics, Surfaces and Interfaces, Fixture, Surfaces, Coatings and Films, Stress (mechanics), Machining, Mechanics of Materials, Chemical-mechanical planarization, Surface roughness, Composite material
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e1d4d73c3038cd8b9ae9d65797a85767
https://doi.org/10.1115/1.555398 -
7
المؤلفون: Joseph A. Levert, John A. Tichy, Steven Danyluk, Lei Shan
المصدر: Journal of The Electrochemical Society. 146:1523-1528
مصطلحات موضوعية: Suction, Materials science, Renewable Energy, Sustainability and the Environment, Fluid mechanics, Fluid bearing, Surface finish, Mechanics, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Classical mechanics, Contact mechanics, Chemical-mechanical planarization, Materials Chemistry, Electrochemistry, Lubrication, Fluid pressure
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8
المؤلفون: Joseph A. Levert, F. Mess, Steven Danyluk
المصدر: Wear. 211:311-315
مصطلحات موضوعية: Materials science, Silicon, business.industry, Polishing, chemistry.chemical_element, Surfaces and Interfaces, Integrated circuit, Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, Optics, chemistry, Mechanics of Materials, law, Materials Chemistry, Sapphire, Surface roughness, Vertical displacement, business, Displacement (fluid)
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9
المصدر: STLE/ASME 2008 International Joint Tribology Conference.
مصطلحات موضوعية: body regions, Materials science, integumentary system, Deflection (engineering), Chemical-mechanical planarization, Abrasive, Forensic engineering, Polishing, Dielectric, Composite material, Contact area, Porosity, Rubbing
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1c70778ad1ad654e062cce88f4b289a8
https://doi.org/10.1115/ijtc2008-71217 -
10
المؤلفون: Yangro Lee, Joseph A. Levert, Joo Hoon Choi, Chad S. Korach, Louis E. DeMarco, Richard T. Leveille
المصدر: ASME/STLE 2007 International Joint Tribology Conference, Parts A and B.
مصطلحات موضوعية: Scanning probe microscopy, Materials science, Fabrication, Chemical-mechanical planarization, Abrasive, Delamination, Polishing, Nanotechnology, Wafer, Composite material, Tribometer
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a7ec4a660b89754b14f07654fc770738
https://doi.org/10.1115/ijtc2007-44383