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المؤلفون: Joseph Michael Imhof, Laura Brown, Douglas J. Resnick, Kosta Selinidis, Dwayne L. LaBrake, Sidlgata V. Sreenivasan, Gary Doyle, Christopher Michael Jones
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, business.industry, Replica, Flash memory, Optics, Resist, Computer data storage, Patterned media, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, X-ray lithography, business, Lithography, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8d11285df2a7d94b94ceb2d3276bdc56
https://doi.org/10.1117/12.898865 -
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المؤلفون: Gary Doyle, Douglas J. Resnick, Kosta Selinidis, Sidlgata V. Sreenivasan, Christopher Michael Jones, Laura Brown, Joseph Michael Imhof, Cynthia B. Brooks, Dwayne L. LaBrake
المصدر: Alternative Lithographic Technologies III.
مصطلحات موضوعية: Optics, Fabrication, Resist, business.industry, Computer science, Patterned media, Wafer, Dry etching, Photomask, business, Lithography, Computer hardware, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ee997cffd7bff6c5930fa6a80d2db643
https://doi.org/10.1117/12.881647 -
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المؤلفون: Laura Brown, Gary Doyle, Kosta Selinidis, Christopher Ellis Jones, Douglas J. Resnick, Dwayne L. LaBrake, Cynthia B. Brooks, Sidlgata V. Sreenivasan, Joseph Michael Imhof
المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 10:043005
مصطلحات موضوعية: business.industry, Computer science, Mechanical Engineering, Replica, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Flash memory, Electronic, Optical and Magnetic Materials, Optics, Resist, Computer data storage, Patterned media, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, Electrical and Electronic Engineering, Photomask, business, Lithography, Electron-beam lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c42a5fff3f1038004af4f20dcb31845b
https://doi.org/10.1117/1.3646523