-
1Absolute coordinate system adjustment and calibration by using standalone alignment metrology system
المؤلفون: Haruki Saito, Takehisa Yahiro, Takanobu Okamoto, Tetsuya Kawata, Satoshi Ando, Katsushi Makino, Yuji Shiba, Masahiro Morita, Jun Ishikawa, Sayuri Tanaka
المصدر: Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
مصطلحات موضوعية: Computer science, Distortion, Coordinate system, Calibration, Process control, Overlay, Grid, Lithography, Algorithm, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a35311fa67d92efde69ff4a2062162af
https://doi.org/10.1117/12.2583695 -
2
المؤلفون: Haruki Saito, Patrick Lomtscher, Steven Tottewitz, Takehisa Yahiro, Boris Habets, Katsushi Makino, Jiro Hanaue
المصدر: Metrology, Inspection, and Process Control for Microlithography XXXIV.
مصطلحات موضوعية: Scanner, Software, business.industry, Computer science, Fingerprint (computing), Electronic engineering, Feed forward, Sampling (statistics), Overlay, business, Throughput (business), Field (computer science)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::62916dd52c8f3edca10b0076ac63e67f
https://doi.org/10.1117/12.2551603 -
3
المؤلفون: Hisashi Suzuki, Kazuki Takahashi, Katsushi Makino
المصدر: Jiban Kogaku Janaru (Japanese Geotechnical Journal). 4:225-232
مصطلحات موضوعية: Materials science, Glass fragment, Composite material
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8f0211e6dfecdf4a4052a014109678d1
https://doi.org/10.3208/jgs.4.225 -
4
المؤلفون: Katsushi Makino, Hisashi Suzuki, Yuji Itasaka
المصدر: Jiban Kogaku Janaru (Japanese Geotechnical Journal). 1:85-93
مصطلحات موضوعية: Base course, Materials science, Metallurgy, Glass aggregate, Urban heat island
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9079769d7389372650b9eac29293f9fe
https://doi.org/10.3208/jgs.1.85 -
5
المؤلفون: Tomoyuki Matsuyama, Toshiharu Nakashima, Masayuki Murayama, Hajime Yamamoto, Katsushi Makino, Ayako Sukegawa, Naonori Kita, Kazuo Masaki, Shintaro Kudo, Junji Ikeda, Hajime Aoyama, Ryota Matsui, Taro Ogata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Lens (optics), Scanner, Optics, law, business.industry, Computer science, Computational lithography, Reticle, Electronic engineering, Process window, business, Lithography, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::002b098c421495278258d9ef6e6e8e65
https://doi.org/10.1117/12.2046547 -
6
المؤلفون: Park Hongki, Takahisa Kikuchi, Nobuyuki Takahashi, Shinji Wakamoto, Akiko Mori, Katsushi Makino, Satoru Sasamoto
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, business.industry, Computer science, Distortion (optics), Embedded system, Immersion (virtual reality), Wafer, Overlay, business, Grid, Lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e1169a2d3587df3c2f4bee05d0001e97
https://doi.org/10.1117/12.2010875 -
7
المؤلفون: Chihaya Motoyoshi, Katsushi Makino, Yuji Shiba, Hajime Yamamoto, Yuuki Ishii, Yasuhiro Morita, Jin Udagawa, Takahisa Kikuchi, Yosuke Shirata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Semiconductor device fabrication, business.industry, Computer science, Node (networking), Immersion (virtual reality), Multiple patterning, Optoelectronics, Overlay, business, Telecommunications, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::563463dc245a1d8201ca7054bdfd62fc
https://doi.org/10.1117/12.916246 -
8
المؤلفون: M. McCallum, Tomoharu Fujiwara, L. Lattard, N. Takahashi, Katsushi Makino, Akira Tokui, S. Sasamoto, R. Morton
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Materials science, business.industry, Surface roughness, Multiple patterning, Optoelectronics, Nanotechnology, Wafer, Surface finish, Overlay, business, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c8b645ba068d59629caee0899e2ca167
https://doi.org/10.1117/12.916362 -
9
المؤلفون: Tomoharu Fujiwara, Katsushi Makino, Céline Lapeyre, N. Takahashi, R. Morton, L. Lattard, Akira Tokui, M. McCallum
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, business.industry, Computer science, Multiple patterning, Process (computing), Nanotechnology, Layer (object-oriented design), business, Lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::30ccdc801202f959a6b047c4fd6f1aa1
https://doi.org/10.1117/12.878953 -
10
المؤلفون: Ya-Tsz Yeh, Chao-Tien Healthy Huang, Katsushi Makino, Yuyu Chen, Min-Hin Tung, David Tien, James Manka, Chin-Chou Kevin Huang, Sheng-Hsiung Yu, John C. Robinson, Lei-Ken Wu, Shian-Huan Cooper Chiu, Jium-Ming Lin
المصدر: Metrology, Inspection, and Process Control for Microlithography XXIII.
مصطلحات موضوعية: Flexibility (engineering), Scanner, Matching (statistics), Computer science, Distortion, Real-time computing, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d3c9ed74ce6493de76b8f15ced52d599
https://doi.org/10.1117/12.814186