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المؤلفون: N. Sagawa, Y. Iriuchijima, T. Hayashi, T. Sei, T. Takahiro, K. Nakamura, T. Fujiwara, Kenichi Shiraishi, Hamid R. Khorram, Katsushi Nakano
المصدر: IEEE Transactions on Semiconductor Manufacturing. 25:63-71
مصطلحات موضوعية: Engineering drawing, Materials science, Process (engineering), business.industry, Overlay, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, Cost reduction, Resist, Multiple patterning, Electrical and Electronic Engineering, Process engineering, business, Throughput (business), Lithography, Immersion lithography
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2
المصدر: Journal of Groundwater Hydrology. 49:17-32
مصطلحات موضوعية: Engineering, Sequential analysis, business.industry, Borehole, Geotechnical engineering, Sequential test, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e0539374d990b55e7f201a3e4ce82b46
https://doi.org/10.5917/jagh1987.49.17 -
3
المؤلفون: Katsushi Nakano
المصدر: Review of Scientific Instruments. 71:137-141
مصطلحات موضوعية: Scanner, Scanning probe microscopy, Materials science, Optics, business.industry, Vertical direction, Atomic force acoustic microscopy, Scanning capacitance microscopy, Conductive atomic force microscopy, business, Tracking (particle physics), Instrumentation, Non-contact atomic force microscopy
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4
المؤلفون: Katsushi Nakano
المصدر: Review of Scientific Instruments. 69:1406-1409
مصطلحات موضوعية: Scanner, Materials science, Cantilever, Microscope, business.industry, Noise (electronics), law.invention, Lens (optics), Optics, Optical microscope, law, Magnetic force microscope, Actuator, business, Instrumentation
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5
المؤلفون: Nobuhisa Ogata, Kaoru Koide, Katsushi Nakano
المصدر: Journal of Nuclear Fuel Cycle and Environment. 4:59-71
مصطلحات موضوعية: Environmental science, Current (fluid), Environmental planning, Groundwater
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d395fa655180d3fa14dc7dde69ceced7
https://doi.org/10.3327/jnuce.4.59 -
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المصدر: SPIE Proceedings.
مصطلحات موضوعية: Scanner, Materials science, Optics, Water flow, business.industry, Nozzle, Immersion (virtual reality), business, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e5716220f50720559d66a362274187b0
https://doi.org/10.1117/12.916271 -
7
المؤلفون: Toshiyuki Sekito, Yasuhiro Iriuchijima, Katsushi Nakano, Soichi Owa, Rei Seki, Toshihiko Sei, Yoshihiro Maruta, Tsunehito Hayashi, Tomoharu Fujiwara, Kenichi Shiraishi, Tadamasa Kawakubo
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Contact angle, Cost reduction, Materials science, Resist, business.industry, Multiple patterning, Optoelectronics, Wafer, Overlay, business, Immersion lithography, Manufacturing cost
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6110aecfaa49b34d2e530e425b6e7a75
https://doi.org/10.1117/12.846520 -
8
المصدر: Journal of the Japan Society of Engineering Geology. 32:321-332
مصطلحات موضوعية: Permeability (earth sciences), Hydrogeology, Hydraulic conductivity, Aquifer test, Electrical resistivity and conductivity, Lithology, Hydraulic test, Soil science, Geotechnical engineering, Geology, Grain size
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9667254ed45d968f427b44928155c45e
https://doi.org/10.5110/jjseg.32.321 -
9
المؤلفون: S. Wakamizu, Ryo Tanaka, Katsushi Nakano, H. Kyouda, Tomoharu Fujiwara
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Nanotechnology, engineering.material, High volume manufacturing, law.invention, Joint research, Coating, law, engineering, Immersion (virtual reality), Optoelectronics, Wafer, Photolithography, business, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3c26e7857d5a601dd3c57a1d72237f0c
https://doi.org/10.1117/12.814112 -
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المؤلفون: Katsushi Nakano, Masato Yoshida, Yasuhiro Iriuchijima, Tomoharu Fujiwara, Rei Seki, Toshiyuki Sekito, Soichi Owa
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Contact angle, Materials science, Resist, law, Wafer, Nanotechnology, Surface finish, Photolithography, Composite material, Lithography, Immersion lithography, law.invention, Process conditions
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a690e0843ff897168b4958727bbea06c
https://doi.org/10.1117/12.814238