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1
المؤلفون: Yusaku Nakashima, Koichi Maari, Takuya Kishimoto, Kazunori Nagahata, Jun Ogi, Takayuki Ezaki, Yuri Kato, Yoshihisa Matoba, Shigeki Hashimoto, Chigusa Yamane, Yusuke Oike
المصدر: Biointerphases. 12(5)
مصطلحات موضوعية: Cytological Techniques, General Physics and Astronomy, Action Potentials, 02 engineering and technology, Noise (electronics), General Biochemistry, Genetics and Molecular Biology, Biomaterials, 03 medical and health sciences, 0302 clinical medicine, Spatio-Temporal Analysis, Hardware_INTEGRATEDCIRCUITS, 0202 electrical engineering, electronic engineering, information engineering, Animals, General Materials Science, Myocytes, Cardiac, Physics, business.industry, Electrodiagnosis, 020208 electrical & electronic engineering, General Chemistry, Multielectrode array, Chip, Rats, Microelectrode, CMOS, Electrode, Scalability, Optoelectronics, business, Microelectrodes, 030217 neurology & neurosurgery, Communication channel
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2
المؤلفون: Pascal Friederich, Kazunori Nagahata, Akiko Hirata, Tetsuya Tatsumi, Masanaga Fukasawa, Karin Fink, Satoshi Hamaguchi, Hu Li, Wolfgang Wenzel, Kazuhiro Karahashi
المصدر: Japanese Journal of Applied Physics. 57:06JC05
مصطلحات موضوعية: 010302 applied physics, Hydrogen ion, Materials science, Physics and Astronomy (miscellaneous), Inorganic chemistry, Doping, General Engineering, Oxide, General Physics and Astronomy, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, chemistry.chemical_compound, chemistry, Etching (microfabrication), 0103 physical sciences, Surface modification, 0210 nano-technology, Tin, Indium
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3
المؤلفون: Hu Li, Satoshi Hamaguchi, Tetsuya Tatsumi, Masanaga Fukasawa, Kazuhiro Karahashi, Akiko Hirata, Kazunori Nagahata
المصدر: Japanese Journal of Applied Physics. 57:06JB02
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Hydrogen, Oxide, General Physics and Astronomy, chemistry.chemical_element, macromolecular substances, 02 engineering and technology, digestive system, 01 natural sciences, chemistry.chemical_compound, stomatognathic system, Etching (microfabrication), 0103 physical sciences, 010302 applied physics, fungi, Doping, technology, industry, and agriculture, General Engineering, 021001 nanoscience & nanotechnology, Selective surface, chemistry, Chemical engineering, 0210 nano-technology, Tin, Layer (electronics), Indium
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4
المؤلفون: Kazunori Nagahata, Akiko Hirata, Tetsuya Tatsumi, Wolfgang Wenzel, Kazuhiro Karahashi, Pascal Friederich, Satoshi Hamaguchi, Masanaga Fukasawa, Karin Fink, Hu Li
المصدر: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35(5):05C303
مصطلحات موضوعية: 010302 applied physics, Materials science, Ion beam, Hydrogen, Inorganic chemistry, chemistry.chemical_element, 02 engineering and technology, Surfaces and Interfaces, Zinc, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Photochemistry, 01 natural sciences, Surfaces, Coatings and Films, Ion, Hydrogen storage, chemistry, Sputtering, Etching (microfabrication), 0103 physical sciences, Irradiation, 0210 nano-technology
وصف الملف: application/pdf
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5
المؤلفون: Kazunori Nagahata, Toshifumi Takizawa, Ken Katahira, Masanaga Fukasawa, Shoji Kobayashi, Tetsuya Tatsumi, Satoshi Hamaguchi, Michio Isobe
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 27:844-848
مصطلحات موضوعية: Plasma etching, Materials science, Contact resistance, Inorganic chemistry, Analytical chemistry, Oxide, Surfaces and Interfaces, Penetration (firestop), Plasma, Condensed Matter Physics, Surfaces, Coatings and Films, Ion, chemistry.chemical_compound, Ashing, chemistry, Sputtering
وصف الملف: application/pdf
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6
المؤلفون: Yukihiro Kamide, Saburo Uchida, Masaru Hori, Kazunori Nagahata, Keiji Oshima, Masanaga Fukasawa, Seigo Takashima, Tetsuya Tatsumi
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:870-874
مصطلحات موضوعية: Permittivity, Faceting, Materials science, Adsorption, Analytical chemistry, Capacitively coupled plasma, Surfaces and Interfaces, Plasma, Dielectric, Thin film, Condensed Matter Physics, Surfaces, Coatings and Films, Ion
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7
المؤلفون: Keiji Ohshima, Masanaga Fukasawa, Seigo Takashima, Tetsuya Tatsumi, Saburo Uchida, Kazunori Nagahata, Masaru Hori
المصدر: Japanese Journal of Applied Physics. 47:3621-3624
مصطلحات موضوعية: Plasma etching, Physics and Astronomy (miscellaneous), Ashing, X-ray photoelectron spectroscopy, Chemistry, Ellipsometry, Radical, General Engineering, Analytical chemistry, General Physics and Astronomy, Dielectric, Plasma, Ion
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8
المؤلفون: Y. Nogami, K. Urata, T. Saitoh, Kazunori Nagahata, K. Shinohara, T. Tatsumi
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:938-946
مصطلحات موضوعية: Materials science, technology, industry, and agriculture, Analytical chemistry, Surfaces and Interfaces, Plasma, Partial pressure, Condensed Matter Physics, Dissociation (chemistry), Surfaces, Coatings and Films, Process window, Fluorocarbon, Reactive-ion etching, Thin film, Porosity
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9
المؤلفون: Akiko Hirata, Hu Li, Tetsuya Tatsumi, Satoshi Hamaguchi, Masanaga Fukasawa, Kazunori Nagahata, Takushi Shigetoshi, Masaki Okamoto, Kazuhiro Karahashi
المصدر: Japanese Journal of Applied Physics. 56:06HD02
مصطلحات موضوعية: 010302 applied physics, Materials science, Physics and Astronomy (miscellaneous), Hydrogen, Inorganic chemistry, General Engineering, Oxide, General Physics and Astronomy, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Indium tin oxide, chemistry.chemical_compound, chemistry, Etching (microfabrication), 0103 physical sciences, Reactive-ion etching, 0210 nano-technology, Tin, Layer (electronics), Indium
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10دورية أكاديمية
المؤلفون: Jun Ogi, Yuri Kato, Yoshihisa Matoba, Chigusa Yamane, Kazunori Nagahata, Yusaku Nakashima, Takuya Kishimoto, Shigeki Hashimoto, Koichi Maari, Yusuke Oike, Takayuki Ezaki
المصدر: Biointerphases; Dec2017, Vol. 12 Issue 5, p1-8, 8p
مصطلحات موضوعية: MICROMETERS, MICROELECTRODES, METAL oxide semiconductors, INTEGRATED circuits, PIXELS