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1دورية أكاديمية
المؤلفون: Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shigeru Takatsuji, Takahiro Kimura, Kazuo Kinose, Soichi Nadahara, Masazumi Nishikawa, Akinori Ebe, Kenji Ishikawa, Osamu Oda, Masaru Hori
المصدر: ACS Omega, Vol 5, Iss 41, Pp 26776-26785 (2020)
وصف الملف: electronic resource
Relation: https://doaj.org/toc/2470-1343
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2
المؤلفون: Osamu Oda, Takahiro Kimura, Kazuo Kinose, Shigeru Takatsuji, Masaru Hori, Soichi Nadahara, Akira Horikoshi, Masazumi Nishikawa, Kenji Ishikawa, Akinori Ebe, Atsushi Tanide, Shohei Nakamura
المصدر: ACS Omega, Vol 5, Iss 41, Pp 26776-26785 (2020)
ACS Omegaمصطلحات موضوعية: Materials science, Hydrogen, business.industry, General Chemical Engineering, chemistry.chemical_element, General Chemistry, Plasma, High-electron-mobility transistor, Nitrogen, Article, Dual (category theory), Chemistry, chemistry, Sputtering, Optoelectronics, business, QD1-999
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3
المؤلفون: Shigeru Takatsuji, Makoto Sekine, Akira Horikoshi, Shohei Nakamura, Masaru Hori, Soichi Nadahara, Motohiro Kohno, Kazuo Kinose, Kenji Ishikawa, Atsushi Tanide
المصدر: Journal of Vacuum Science & Technology B. 37:021209
مصطلحات موضوعية: Materials science, Analytical chemistry, chemistry.chemical_element, Gallium nitride, macromolecular substances, 02 engineering and technology, Substrate (electronics), 01 natural sciences, chemistry.chemical_compound, stomatognathic system, Etching (microfabrication), 0103 physical sciences, Materials Chemistry, Chlorine, Electrical and Electronic Engineering, Boron, Instrumentation, 010302 applied physics, Plasma etching, Process Chemistry and Technology, fungi, technology, industry, and agriculture, BCL3, Plasma, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, 0210 nano-technology
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4
المؤلفون: Soichi Nadahara, Masazumi Nishikawa, Shigeru Takatsuji, Akira Horikoshi, Motohiro Kohno, Akinori Ebe, Kazuo Kinose, Masaru Hori, Shohei Nakamura, Atsushi Tanide, Kenji Ishikawa
المصدر: Japanese Journal of Applied Physics. 58:SAAF04
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Chemical engineering, chemistry, General Engineering, General Physics and Astronomy, chemistry.chemical_element, Sputter deposition, Epitaxy, Nitrogen
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5
المؤلفون: Akio Sanda, Kazuo Kinose, Kazutaka Taniguchi, Kunio Ueta, Azai Kichiji
المصدر: SID Symposium Digest of Technical Papers. 37:1774
مصطلحات موضوعية: Wavelength, Mura, Optics, Materials science, Resist, Interference (communication), business.industry, Reflection (physics), Transmittance, Optoelectronics, Photoresist, business, Layer (electronics)
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6دورية أكاديمية
المؤلفون: Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shigeru Takatsuji, Motohiro Kohno, Kazuo Kinose, Soichi Nadahara, Masazumi Nishikawa, Akinori Ebe, Kenji Ishikawa, Masaru Hori
المصدر: Japanese Journal of Applied Physics; Feb2019, Vol. 58 Issue SA, p1-1, 1p