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1دورية أكاديمية
المؤلفون: Yoshihiro Sato, Satoshi Shibata, Takayoshi Yamada, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami, Keiichiro Urabe, Koji Eriguchi
المصدر: IEEE Journal of the Electron Devices Society, Vol 10, Pp 769-777 (2022)
مصطلحات موضوعية: P–n junction, leakage current, CMOS image sensor, dark current, plasma materials processing, MOSFET, Electrical engineering. Electronics. Nuclear engineering, TK1-9971
وصف الملف: electronic resource
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2
المؤلفون: Junki Morozumi, Takahiro Goya, Tomohiro Kuyama, Koji Eriguchi, Keiichiro Urabe
المصدر: Japanese Journal of Applied Physics. 62:SI1010
مصطلحات موضوعية: General Engineering, General Physics and Astronomy
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3
المؤلفون: Yoshihiro Sato, Satoshi Shibata, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami, Keiichiro Urabe, Koji Eriguchi
المصدر: Journal of Vacuum Science & Technology B. 40:062209
مصطلحات موضوعية: Process Chemistry and Technology, Materials Chemistry, Electrical and Electronic Engineering, Instrumentation, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials
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4
المؤلفون: Yoshihiro Sato, Keiichiro Urabe, Takayoshi Yamada, Masashi Murakami, Masayuki Yamasaki, Koji Eriguchi, Nishimura Kazuko
المصدر: 2021 20th International Workshop on Junction Technology (IWJT).
مصطلحات موضوعية: Materials science, business.industry, Transistor, NAND gate, Integrated circuit, law.invention, Photodiode, CMOS, law, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, business, p–n junction, Plasma processing, Dark current
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::49a08907f0e0b7668dd069516bd400e7
https://doi.org/10.23919/iwjt52818.2021.9609500 -
5Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis
المؤلفون: Tomohiro Kuyama, Keiichiro Urabe, Koji Eriguchi
المصدر: Journal of Applied Physics. 131:133302
مصطلحات موضوعية: General Physics and Astronomy
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6
المؤلفون: Keiichiro Urabe, Tomohiro Kuyama, Koji Eriguchi
المصدر: IRPS
مصطلحات موضوعية: 010302 applied physics, Materials science, Condensed matter physics, Time evolution, 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, 01 natural sciences, Omega, Spectral line, Dielectric spectroscopy, 0103 physical sciences, Nyquist plot, 0210 nano-technology, Spectroscopy, Electrical impedance
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8c5eeaabaaddeebc0de7dddee19d71bf
https://doi.org/10.1109/irps46558.2021.9405190 -
7
المؤلفون: Masashi Murakami, Nishimura Kazuko, Takayoshi Yamada, Masayuki Yamasaki, Yoshihiro Sato, Koji Eriguchi, Keiichiro Urabe
المصدر: 2020 IEEE International Electron Devices Meeting (IEDM).
مصطلحات موضوعية: Materials science, Silicon, business.industry, chemistry.chemical_element, Hardware_PERFORMANCEANDRELIABILITY, Plasma, Characterization (materials science), chemistry, CMOS, Optoelectronics, Image sensor, business, Plasma processing, Leakage (electronics), Dark current
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2e9dab1d4b1acfd38697ea2edf25074c
https://doi.org/10.1109/iedm13553.2020.9372074 -
8
المؤلفون: Takashi Hamano, Takayuki Matsuda, Yuya Asamoto, Masao Noma, Shigehiko Hasegawa, Michiru Yamashita, Keiichiro Urabe, Koji Eriguchi
المصدر: Applied Physics Letters. 120:031904
مصطلحات موضوعية: Physics and Astronomy (miscellaneous)
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9
المؤلفون: Takashi Hamano, Keiichiro Urabe, Koji Eriguchi
المصدر: Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e6e5541087221790a43feda93ad5a641
https://doi.org/10.7567/ssdm.2020.k-1-04 -
10
المؤلفون: Takashi Hamano, Koji Eriguchi, Keiichiro Urabe
المصدر: 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).
مصطلحات موضوعية: 010302 applied physics, Fabrication, Materials science, business.industry, Plasma parameters, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, Plasma, 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, Capacitor, law, 0103 physical sciences, MOSFET, Hardware_INTEGRATEDCIRCUITS, Density of states, Optoelectronics, 0210 nano-technology, business, Plasma processing, Energy (signal processing)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3737ae22434116c90cfde05386a53a86
https://doi.org/10.23919/sispad49475.2020.9241621