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المؤلفون: Keith A. Benton, Isabella T. Lewis, Somit Talwar, K.‐Josef Kramer, John E. Davison, Kenneth Williams, Kurt H. Weiner
المصدر: Applied Physics Letters. 68:2320-2322
مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Silicon, Excimer laser, Dopant, business.industry, medicine.medical_treatment, Doping, Analytical chemistry, chemistry.chemical_element, Gas immersion laser doping, Ion implantation, chemistry, medicine, Optoelectronics, Wafer, business, p–n junction