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1Physical and Electrical Characterization of Deep Trench Isolation in Bulk Silicon and SOI Substrates
المؤلفون: Sallie Hose, Lahcen Boukhanfra, Lan Su, Masaichi Eda, Rick Jerome, Weize Chen, Jaroslav Pjencak, Thomas F. Long, Johan Janssens, Moshe Agam, Kenn Bates
المصدر: 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Materials science, Silicon, business.industry, Deep trench, Silicon on insulator, chemistry.chemical_element, Dielectric, Metrology, Characterization (materials science), chemistry, Trench, Optoelectronics, Electrical measurements, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ee709b0dc0ae9329ba2354d27b3c85ae
https://doi.org/10.1109/asmc51741.2021.9435655 -
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