المؤلفون: Kenslea, Anne, Hakala, Chris, Zhong, Zhenxin, Lu, Yinggang, Fretwell, John, Hager, Jack, Kang, Chris, Tan, Haiyan, Weng, Weihao, Dumas, Laurent, Brooks, Irene

المصدر: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :324-327 Apr, 2018

Relation: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

المؤلفون: Johanesen, Hayley, Kenslea, Anne, Williamson, Mark, Knowles, Matt, Kwakman, Laurens, Van Puymbroeck, Jan, Felder, Dan, Levi, Shimon, Nishry, Noam, Adan, Ofer, Englard, Ilan, Gov, Shahar, Cohen, Oded, Turovets, Igor

المصدر: 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI. :329-335 May, 2015

Relation: 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

المؤلفون: Brid Connolly, Nikolai Kasper, Ilan Englard, Gaoliang Dai, Kurt G. Ronse, Shimon Levi, Kenslea Anne, Laurens Kwakman, Hayley Johanesen, Markus Bender, Sven Krannich, Ishai Swrtsband, Bogumila Kutrzeba-Kotowska, Maxim Rabinovitch, Frank Scholze, Romy Wende, Igor Turovets, Vladislav Kaplan

المصدر: Metrology, Inspection, and Process Control for Microlithography XXXII.

مصطلحات موضوعية: Optics, Materials science, business.industry, Scattering, Extreme ultraviolet lithography, Wafer, Sensitivity (control systems), Surface finish, business, Integrated circuit layout, Metrology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::216897eb110df67bf56b0abe81d082c0
https://doi.org/10.1117/12.2297265

المؤلفون: Johanesen, Hayley, Strauss, Michael, Kenslea, Anne, Hakala, Chris, Kwakman, Laurens, Boullart, Werner, Mertens, Hans, Yong Kong Siew, Barla, Kathy

المصدر: Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-9, 9p

المؤلفون: Kwakman, Laurens, Kenslea, Anne, Johanesen, Hayley, Cramer, Jillian, Strauss, Michael, Boullart, Werner, Mertens, Hans, Yong Kong Siew, Barla, Kathy

المصدر: Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-14, 14p

المؤلفون: Ukraintsev, Vladimir A., Adan, Ofer, Johanesen, Hayley, Strauss, Michael, Kenslea, Anne, Hakala, Chris, Kwakman, Laurens, Boullart, Werner, Mertens, Hans, Siew, Yong Kong, Barla, Kathy

المصدر: Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109591C-109591C-9, 986329p

المؤلفون: Ukraintsev, Vladimir A., Adan, Ofer, Kwakman, Laurens, Kenslea, Anne, Johanesen, Hayley, Cramer, Jillian, Strauss, Michael, Boullart, Werner, Mertens, Hans, Siew, Yong Kong, Barla, Kathy

المصدر: Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109590C-109590C-14, 10849425p

لا يتم عرض هذه النتيجة على الضيوف.
تسجيل الدخول للوصول الكامل.